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Flat panel detector substrate, manufacturing method, flat panel detector and camera shooting equipment

A flat panel detector and manufacturing method technology, applied in the field of electronics, can solve the problems of limited size, difficult realization, poor image quality of the flat panel detector, etc., so as to improve product image quality, improve detection accuracy, and solve imaging image quality problems. bad effect

Pending Publication Date: 2021-10-26
BEIJING BOE SENSOR TECH CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At present, there are mainly two processing methods of scintillator on the substrate of flat-panel detectors: sticking type and evaporation type. For larger flat-panel detectors, evaporation type is difficult to realize, and the size of the attached scintillator film is also limited. Limited by equipment, it can only be processed by splicing and pasting multiple scintillator films
[0004] However, there are often gaps in the splicing position of multiple scintillator films, which will lead to poor imaging quality of flat panel detectors

Method used

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  • Flat panel detector substrate, manufacturing method, flat panel detector and camera shooting equipment
  • Flat panel detector substrate, manufacturing method, flat panel detector and camera shooting equipment
  • Flat panel detector substrate, manufacturing method, flat panel detector and camera shooting equipment

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Embodiment Construction

[0043] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings.

[0044] Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. The figures are not drawn to scale, with certain details exaggerated and possibly omitted for clarity of presentation. The shapes of the various regions and layers shown in the figure, as well as their relative sizes and positional relationships are only exemplary, and may deviate due to manufacturing tolerances or technical limitations in practice, and those skilled in the art will Regions / layers with different shapes, sizes, and relative positions can be additionally designed as needed.

[0045] In the context of the present disclosure, when a layer / element is referred to as being "on" another layer / element, the layer / element may be directly on the other layer / element, or there may be intervening layer...

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Abstract

The invention discloses a flat panel detector substrate, a manufacturing method, a flat panel detector and camera shooting equipment, and the flat panel detector substrate comprises: a substrate; a plurality of scintillator films, wherein the plurality of scintillator films are spliced and attached to the surface of the substrate; and a filler made of a scintillator material, wherein the filler made of the scintillator material is filled in splicing gaps among the plurality of scintillator films. According to the invention, the splicing gap can receive high-energy particles or rays, and the high-energy particles or rays are converted into visible light, so that the problem of poor image quality caused by the splicing gap is effectively solved, the image quality of the product is improved, and the detection accuracy of the flat panel detector and the camera shooting equipment is further improved.

Description

technical field [0001] The invention relates to the field of electronic technology, in particular to a flat panel detector substrate, a manufacturing method, a flat panel detector and an imaging device. Background technique [0002] Flat panel detectors are widely used in radiation detection fields such as medical treatment, safety and non-destructive testing through the scintillator absorbing high-energy particles or rays to emit light. [0003] At present, there are mainly two processing methods of scintillator on the substrate of flat-panel detectors: sticking type and evaporation type. For larger flat-panel detectors, the evaporation type is difficult to realize, and because the size of the attached scintillator film is also Limited by equipment, it can only be processed by splicing and pasting multiple scintillator films. [0004] However, there are often gaps in the splicing position of multiple scintillator films, which will lead to poor imaging quality of flat panel...

Claims

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Application Information

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IPC IPC(8): H01L31/0232H01L27/146G01T1/20
CPCH01L31/02322H01L27/14625H01L27/14685G01T1/20
Inventor 李金钰侯学成张冠
Owner BEIJING BOE SENSOR TECH CO LTD
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