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Vibration isolation system having magnetic actuator, and magnetic actuator

A vibration isolator, vibration isolation technology, used in propulsion systems, non-rotating vibration suppression, electromagnets with armatures, etc., can solve problems such as interference with magnetic-sensitive appliances, influence, and combined operation of magnetic-sensitive appliances

Pending Publication Date: 2021-11-02
集成动力工程股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, a disadvantage of known magnetic actuators is the magnetic field generated by the permanent magnets and / or windings
[0008] They may interfere with magnetically sensitive equipment, such as scanning electron microscopes or transmission electron microscopes, and therefore cannot usually be installed near the equipment
[0009] This leads to the inability of magnetically sensitive instruments, such as those used for processing semiconductor components, or high-precision measuring instruments such as electron microscopes or especially transmission electron The magnetic field of the actuator can affect or distort the measurement results
[0010] This leads to another disadvantage that the above-mentioned steady-state vibration isolation systems with magnetic actuators cannot be used due to interference caused by magnetic fields, so such high-precision measuring instruments cannot usually be installed in production facilities or other Operation near equipment

Method used

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  • Vibration isolation system having magnetic actuator, and magnetic actuator
  • Vibration isolation system having magnetic actuator, and magnetic actuator
  • Vibration isolation system having magnetic actuator, and magnetic actuator

Examples

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Embodiment Construction

[0086] figure 1 A schematic cross-sectional view of an embodiment of a magnetic actuator 1 provided for use in a vibration isolation system is shown.

[0087] The magnetic actuator 1 includes a magnet carrier 2 .

[0088] The magnet carrier 2 has a U-shaped configuration and comprises two opposite legs 5 a , 5 b which are connected to one another on one side by means of a plate 6 .

[0089] In this embodiment, two opposing magnet pairs 3a, 3b and 4a, 4b are attached to legs 5a, 5b.

[0090] The magnets 3a, 3b, 4a, 4b are fastened, in particular adhered, to the legs 5a, 5b.

[0091] The magnetic poles of the magnet pairs 3a, 3b and 4a, 4b are opposite to each other. Correspondingly, the magnetic field extends from one leg 5a to the other leg 5b.

[0092] In the present embodiment the magnets 3a, 3b, 4a, 4b are arranged such that the magnetic fields of the two magnet pairs 3a, 3b and 4a, 4b are oppositely oriented.

[0093] The winding carrier 7, which in this embodiment i...

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Abstract

The invention relates to an active vibration isolation system having a magnetic actuator. The magnetic actuator comprises a coil carrier having at least one coil, which coil carrier extends contactlessly into a magnet carrier, so that the latter is designed as a linear motor. The magnetic actuator is provided with a magnetic shielding which has an opening through which the coil carrier projects into the magnet carrier.

Description

technical field [0001] The present invention relates to a vibration isolation system with a magnetic actuator. In particular, the present invention relates to a steady state vibration isolation system on which magnetically sensitive implements, such as those used for processing semiconductor components or high precision measuring instruments such as electron microscopes, are placed. [0002] The invention also relates to a magnetic actuator for a vibration isolation system. Background technique [0003] Active vibration isolation systems are known from practice. In particular in the semiconductor industry, vibration isolation systems are used in which devices for processing semiconductor components, for example devices for exposing or inspecting wafers, are arranged on at least three vibration isolators. [0004] The vibration isolation systems in which these instruments are placed are also used in high precision measuring instruments, such as electron microscopes or trans...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/03G03F7/20H01F7/02H01F7/06H02K11/01H02K41/02H02K33/18H01F7/08H02K5/04H02K41/035
CPCF16F15/03H01F7/066G03F7/709H02K33/18H02K5/04H02K41/0356H01F7/081H01F7/0289G03F7/70833H02K11/0141H02K11/01F16M5/00H01J37/22H01J37/26
Inventor H·哈特格斯A·埃弗斯S·沙特
Owner 集成动力工程股份有限公司
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