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TOF optical sensing module

A technology of optical sensing and light sensing, which is applied in the field of time-of-flight optical sensing modules, and can solve problems such as interfering with the sensing results of sensing pixels 341

Pending Publication Date: 2021-11-19
EGIS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can be understood that a part of the reference light L2 will continue to be reflected in the chamber 315 and be received by the sensing pixels 341 , thereby disturbing the sensing result of the sensing pixels 341

Method used

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  • TOF optical sensing module
  • TOF optical sensing module
  • TOF optical sensing module

Examples

Experimental program
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Embodiment Construction

[0075]One aspect of the present invention is to use a wafer-level process to fabricate at least one light-guiding structure with a specific angle ( Figure 2A to Figure 6 ), so that the stray light interference conducted in the package structure can be minimized, thereby improving the signal-to-noise ratio (Signal to Noise Ratio, SNR) of the sensing pixel, and solving the above-mentioned problems of the known technology. In the example of two light guide structures with specific angles, the specific implementation is to use microlenses fabricated at the wafer level in conjunction with a light-shielding layer fabricated at the wafer level to fabricate a light guide structure at a reference end angle to guide the light reflected in the cavity (the Usually an oblique incident light) enters the reference pixel, and at the same time, an angled light guide structure at the sensing end is made to prevent the light reflected in the cavity from entering the sensing pixel, so as to avoid...

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Abstract

A TOF optical sensing module at least includes: a substrate; the cap at least comprises a body, a receiving window, a transmitting window and a baffle structure, the receiving window, the transmitting window and the baffle structure are connected with the body, and the body and the substrate jointly define a cavity; the baffle plate structure is arranged between the transmitting window and the receiving window so as to be matched with the transmitting and receiving unit to divide the cavity into a receiving cavity and a transmitting cavity which are respectively arranged below the receiving window and the transmitting window and are not communicated with each other; wherein the transceiver unit at least comprises a light reference area, the light reference area comprises at least one reference pixel, and the reference pixel is arranged below the baffle structure; and the light guide structure is optically coupled to the reference pixel and the emission cavity, so that the reference pixel receives the reference light through the emission cavity and the light guide structure to generate a reference electric signal.

Description

technical field [0001] The present invention relates to a time of flight (Time Of Flight, TOF) optical sensing module, and in particular to a TOF optical sensing module that reduces stray light interference in a cavity. Background technique [0002] Today's smartphones, tablets, or other handheld devices are equipped with optical modules to perform functions such as gesture detection, three-dimensional (3D) imaging or proximity detection, or camera focusing. During operation, the TOF sensor emits near-infrared light into the scene, and uses the time-of-flight information of the light to measure the distance of objects in the scene. The advantages of TOF sensors are that the calculation amount of depth information is small, the anti-interference is strong, and the measurement range is long, so it has gradually been favored. [0003] The core components of the TOF sensor include: a light source, especially an infrared Vertical Cavity Surface Emitting Laser (VCSEL); a light se...

Claims

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Application Information

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IPC IPC(8): G01S17/48G01B11/22
CPCG01S17/48G01B11/22G01S7/4813G01S17/10
Inventor 周正三范成至
Owner EGIS TECH