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Method for observing sample without conducting layer on surface by using scanning electron microscope

An electron microscope, scanning technology, used in material analysis, measurement devices, instruments, etc. using wave/particle radiation, which can solve problems such as distortion, affecting observation quality, and poorly conductive samples, saving time and improving resolution. rate effect

Pending Publication Date: 2021-12-07
TPK TOUCH SOLUTIONS (XIAMEN) INC
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  • Abstract
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  • Application Information

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Problems solved by technology

[0003] Although nano silver wire is a conductive material, when it is coated in a non-conductive organic material and the surface is covered with a non-conductive protective layer, it will become a sample with poor conductivity
[0004] If poorly conductive samples are observed with a scanning electron microscope (see figure 1 ), the incident electrons will continue to accumulate on the surface of the sample, the negative electric field on the surface will increase, the incident electrons will be repelled, and the secondary electrons will be deflected, so that the electric field on the surface of the sample will be unstable, resulting in a serious charging effect, and the image will appear white or black areas with abnormal contrast. Even produce distortion and irregular bands, seriously affecting the quality of observation

Method used

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  • Method for observing sample without conducting layer on surface by using scanning electron microscope
  • Method for observing sample without conducting layer on surface by using scanning electron microscope
  • Method for observing sample without conducting layer on surface by using scanning electron microscope

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Embodiment Construction

[0023] In order to make the purpose, technical solutions and advantages of the disclosure clearer, the disclosure will be further described in detail below in conjunction with the accompanying drawings, implementations, and examples. It should be understood that the specific implementations and examples described herein are only used to explain the present disclosure, and are not intended to limit the scope of the claims.

[0024] please see figure 2 , according to some implementations of the present disclosure, the method 100 for observing a sample without a conductive layer on the surface using a scanning electron microscope includes steps S110 to S140.

[0025] First, step S110 is performed to provide a sample. In some embodiments, the sample includes a nanometer silver wire, the sample is a poorly conductive sample, and the surface of the sample does not contain a conductive layer. In some embodiments, the surface of the sample is covered with a protective layer, and the...

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Abstract

The present disclosure relates to a method for observing a sample without a conducting layer on a surface by using a scanning electron microscope. The method comprises the steps of: providing a sample, the sample comprising silver nanowires, and the surface of the sample being free of a conductive layer; fixing the sample on a sample table of a scanning electron microscope; adjusting the parameters of the scanning electron microscope, wherein the acceleration voltage is between 0.5 kV and 3 kV; and observing the sample, wherein an image of the silver nanowire is presented under the view field. According to the method disclosed by the invention, the resolution of observing the silver nanowire in the poor conductivity sample through the scanning electron microscope is improved, the conventional pretreatment process (such as conductive treatment) and time of the poor conductivity sample are saved, the interference of a surface conductive layer is avoided, and the more real appearance of the silver nanowire can be directly observed.

Description

technical field [0001] The invention relates to the observation field of a scanning electron microscope (SEM), in particular to a method for observing nano-silver wires in samples with poor conductivity without conduction treatment. Background technique [0002] When the scanning electron microscope observes the sample, it emits incident electrons through the cathode. After the incident electrons are accelerated to reach the surface of the sample, a series of physical signals are excited. The probe (or detector) receives the secondary electron and backscattered electron signals to obtain the sample microstructural information. [0003] Although nano silver wire is a conductive material, when it is coated in a non-conductive organic material and covered with a non-conductive protective layer, it will become a sample with poor conductivity. [0004] If poorly conductive samples are observed using a scanning electron microscope (see figure 1 ), the incident electrons will con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/2251
CPCG01N23/2251G01N2223/07G01N2223/102
Inventor 刘小梅钟红花杨詠钧杨培华谢忠诚
Owner TPK TOUCH SOLUTIONS (XIAMEN) INC
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