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Automatic probe inserting device and automatic probe inserting method
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A probe and needle insertion technology, applied in the field of measuring instruments, can solve problems such as poor precision, contaminated samples, and easily damaged probes
Pending Publication Date: 2021-12-28
CHINAINSTRU & QUANTUMTECH (HEFEI) CO LTD
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Abstract
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Problems solved by technology
For this reason, the present invention proposes an automatic needle insertion device for probes, which can reduce the degree of manual intervention and realize automatic needle insertion, and the needle tip and the hardness of the sample to be tested will not appear during the needle insertion process. The phenomenon of contact solves the technical problems of the poor precision of the automatic needle insertion device in the prior art, which easily damages the probe and contaminates the sample
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Embodiment 1
[0115] A probe automatic needle insertion device 1000, the probe automatic needle insertion device 1000 is used to detect the sample 2000 to be tested, such as figure 1 As shown, it includes: a probe assembly 100 , a first translation stage 200 , a second translation stage 300 , an excitation demodulation unit 400 , a computer unit 500 , a first driving unit 600 and a second driving unit 700 .
[0116] Among them, such as figure 1 As shown, the probe assembly 100 and the sample to be tested 2000 are arranged at intervals in the Z direction, the sample to be tested 2000 is located below the probe assembly 100, and the excitation demodulation unit 400 is used to excite the probe assembly 100 to vibrate and demodulate the probe assembly The real-time amplitude of 100, the excitation demodulation unit 400 can also control the first translation stage 200 to move along the Z direction through the first drive unit 600 .
[0117] like figure 1 As shown, the computer unit 500 is conn...
Embodiment 2
[0130] A probe automatic needle insertion device 1000, the probe automatic needle insertion device 1000 is used to detect the sample 2000 to be tested, such as figure 2 As shown, it includes: a probe assembly 100 , a first stage 200 , a second stage 300 , an excitation demodulation unit 400 , a computer unit 500 , a first drive unit 600 and a second drive unit 700 .
[0131] Among them, such as figure 2As shown, the probe assembly 100 and the sample to be tested 2000 are arranged at intervals in the Z direction, the sample to be tested 2000 is located below the probe assembly 100, and the excitation demodulation unit 400 is used to excite the probe assembly 100 to vibrate and demodulate the probe assembly The real-time amplitude of 100, the excitation demodulation unit 400 can also control the first translation stage 200 to move along the Z direction through the first drive unit 600 .
[0132] like figure 2 As shown, the computer unit 500 is connected with the excitation ...
Embodiment 3
[0145] A probe automatic needle insertion device 1000, the probe automatic needle insertion device 1000 is used to detect the sample 2000 to be tested, such as image 3 As shown, it includes: a probe assembly 100 , a first translation stage 200 , a second translation stage 300 , an excitation demodulation unit 400 , a computer unit 500 , a first driving unit 600 and a second driving unit 700 .
[0146] Among them, such as image 3 As shown, the probe assembly 100 and the sample to be tested 2000 are arranged at intervals in the Z direction, the sample to be tested 2000 is located below the probe assembly 100, and the excitation demodulation unit 400 is used to excite the probe assembly 100 to vibrate and demodulate the probe assembly The real-time amplitude of 100, the excitation demodulation unit 400 can also control the first translation stage 200 to move along the Z direction through the first drive unit 600 .
[0147] like image 3 As shown, the computer unit 500 is conn...
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Abstract
The invention discloses an automatic probe inserting device and an automatic probe inserting method. The automatic probe inserting device comprises a probe assembly and two displacement tables, the probe assembly and a to-be-tested sample are arranged in a spaced mode, the probe assembly moves or vibrates relative to the to-be-tested sample, and the two displacement tables move in the set direction and have two matching states; in the first matching state, the two displacement tables move oppositely, the probe assembly and the to-be-tested sample are arranged on the two displacement tables respectively, in the second matching state, the two displacement tables are linked in the same direction, one of the probe assembly and the to-be-tested sample is arranged on the displacement table, and the other one is arranged on the fixed table. The first maximum movement value of the first displacement table is smaller than the second maximum movement value of the second displacement table, and the distance between the probe assembly and the to-be-tested sample is smaller than the second maximum movement value. According to the automatic probe inserting device provided by the embodiment of the invention, the two displacement tables are matched to move the probe assembly and the to-be-tested sample from a relatively long distance to a target distance, so that the automation degree is high.
Description
technical field [0001] The invention belongs to the technical field of measuring instruments, in particular to a probe automatic needle insertion device and a probe automatic needle insertion method. Background technique [0002] SPM (Scanning Probe Microscopy, Scanning Probe Microscopy) is currently one of the most important methods widely used to obtain microscopic material characterization. It mainly relies on the force between the probe and the sample to be tested to characterize the sample to be tested. In In the actual detection process, the distance between the probe and the sample to be tested needs to be gradually moved from a relatively long distance to nanometer level, so as to ensure that the force between the probe and the sample to be tested is appropriate, so as to effectively obtain the sample to be tested surface information. [0003] In the prior art, moving the distance between the probe and the sample to the nanometer level is mainly manual movement. In ...
Claims
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Application Information
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