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Arcing defect detection method of semiconductor machine

A defect detection and semiconductor technology, applied in the field of semiconductor technology, can solve the problems that the operator is not easy to perceive, the arc defect time is short, etc.

Pending Publication Date: 2022-01-11
UNITED SEMICONDUCTOR (XIAMEN) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the time for the above-mentioned arc defect to occur is extremely short, so the operator is not easy to notice

Method used

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  • Arcing defect detection method of semiconductor machine
  • Arcing defect detection method of semiconductor machine
  • Arcing defect detection method of semiconductor machine

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Embodiment Construction

[0011] In order for those skilled in the art to have a better understanding of the present invention, preferred embodiments of the present invention are listed below, together with the accompanying drawings, to describe in detail the composition and desired effects of the present invention.

[0012] For the convenience of description, the drawings of the present invention are only schematic diagrams for easier understanding of the present invention, and the detailed proportions thereof can be adjusted according to design requirements. As for the up-down relationship of the relative components in the figures described in the text, those skilled in the art should understand that it refers to the relative position of the objects, so all of them can be turned over to present the same components, which should all belong to the disclosure of this specification The range is described here.

[0013] As mentioned in the prior art paragraph, the arc defect occurs in a very short time, w...

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PUM

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Abstract

The invention provides an arcing defect detection method of a semiconductor machine, and the method comprises the following steps of: providing a signal detector, connecting the signal detector to a machine, extracting a plurality of voltage values per second by the signal detector, transmitting the plurality of voltage values to a processor, and judging that the plurality of voltage values generate a dip and recovery condition within a specific time range, and finding out the occurrence time of an arcing defect of the machine and the duration time of the arcing defect.

Description

technical field [0001] The invention relates to the field of semiconductor technology, in particular to a method for detecting arcing defects in semiconductor machines. Background technique [0002] Arc, also known as arc discharge, is a phenomenon in which the electric field is too strong, the gas undergoes electric breakdown and continues to form a plasma, so that the current passes through the insulating medium (such as air) in the normal state, or when the high-voltage circuit is energized When a conductor-to-conductor separation occurs, an arc occurs at both ends. [0003] In semiconductor machines, arcing sometimes occurs. When this phenomenon occurs, the voltage of the machine will drop rapidly and then rise again in a very short time (within a few microseconds). This situation is not conducive to the progress of the process, and may even affect the yield of the finished product. Therefore, the arc phenomenon can be regarded as a defect of the semiconductor machine....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/00G01R19/165
CPCG01R31/00G01R19/16576
Inventor 唐余龚亚敏谈文毅
Owner UNITED SEMICONDUCTOR (XIAMEN) CO LTD