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Quartz diffusion tube internally provided with flow balancing structure and method thereof

A technology of balancing flow and quartz tubes, applied in the field of quartz diffusion tubes, can solve the problems such as difficulty in adjusting the sintering effect and degree of processing originals according to actual needs, difficulty in controlling, adjusting and balancing internal mixed gas, and poor diffusion effect, etc. Realize large-diameter diffusion, improve strength, and improve the effect of sufficient mixing

Active Publication Date: 2022-03-15
DONGHAI COUNTY AOBO QUARTZ PROD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 1. The existing quartz diffusion tube fails to successfully guide different gases after entering the tube, making it difficult for the gases to be fully and well mixed automatically
[0005] 2. The existing quartz diffusion tube often has a fixed mixing outlet size, which makes it difficult to achieve a large diffusion effect, resulting in poor d

Method used

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  • Quartz diffusion tube internally provided with flow balancing structure and method thereof
  • Quartz diffusion tube internally provided with flow balancing structure and method thereof
  • Quartz diffusion tube internally provided with flow balancing structure and method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0045] see Figure 1-2 , a quartz diffusion tube with a balanced flow structure inside, including a quartz tube main body 1, a flow guide mechanism 2, a mixing chamber 3, an adjustment mechanism 4 and a rotor assembly 5 are arranged inside the quartz tube main body 1, and the flow guide mechanism 2 is provided At the front end inside the quartz tube main body 1, the adjustment mechanism 4 is arranged behind the flow guide mechanism 2, the flow guide mechanism 2 and the adjustment mechanism 4 are connected through the mixing chamber 3, and the rotor assembly 5 is arranged in the inside of the quartz tube main body 1. At the tail end, the setting of the rotating blade assembly 5 can drive the fan blades to rotate when the mixed gas arrives, thereby improving the intensity of diffusion. At the same time, the rotating rotating blade assembly 5 stirs the gas, which improves the full mixing of different gases.

[0046] see image 3 The quartz tube main body 1 includes an air inlet ...

Embodiment 2

[0057] see Figure 11-12 , with respect to Embodiment 1, the support assembly 6 is removed from the inside of the quartz tube main body 1, a diffusion chamber 16 is provided between the installation cavity 14 and the mixing outlet 19, and a through hole 15 is opened at the front end of the diffusion chamber 16, and the through hole 15 and the installation The cavity 14 is connected, and the rear end of the diffusion chamber 16 is connected with the mixing outlet 19. The inside of the diffusion chamber 16 is provided with a slanted wall 17, and the inner diameter of the through hole 15 is smaller than the inner diameter of the mixing outlet 19. The overall diffusion chamber 16 is composed of the through hole 15 To the trumpet shape that gradually enlarges to the mixing outlet 19, compared to the gas that is directly discharged from the adjustment mechanism 4 for diffusion, the diffusion chamber 16 and the inclined wall 17 can induce and guide the gas, thereby realizing large-dia...

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PUM

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Abstract

The invention discloses a quartz diffusion tube internally provided with a flow balancing structure and a method thereof, and belongs to the technical field of quartz diffusion tubes. In order to solve the problems that the flow is difficult to balance and dispersed gas is not thoroughly mixed, the rotating vane assembly is arranged at the tail end in the quartz tube main body and can drive the fan blades to rotate when the mixed gas arrives, so that the diffusion strength is improved, meanwhile, the gas is stirred, the sufficient mixing of different gases is improved, and the diffusion effect is improved. A flow guide channel is connected between the air inlet hole and the air outlet hole, different gases enter the air outlet hole from the air inlet hole to be discharged under pressure, so that the dispersed gases are converged on the air outlet surface, and the mixing speed of the different gases in the dispersion furnace is increased. The size of an opening between the flow choking blocks can be adjusted by rotating the rotary knob, so that the flow in the quartz tube main body is subjected to balance adjustment, and operation adjustment can be performed according to actual requirements and conditions in the sintering process.

Description

technical field [0001] The invention relates to the technical field of quartz diffusion tubes, in particular to a quartz diffusion tube with a balanced flow structure inside and a method thereof. Background technique [0002] Diffusion furnace is one of the important process equipment in the pre-process of semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. [0003] The more advanced diffusion furnace control systems have been updated or upgraded to microcomputer control, and the communication between the tube machine and the host computer is carried out through serial port RS232 or network cable. Most of the control system software is based on the Windows system, which greatly improves the practicability and operability, and can realize log recording, curve recording, program editin...

Claims

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Application Information

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IPC IPC(8): C30B31/10C30B31/18
CPCC30B31/10C30B31/18
Inventor 孔凡昌
Owner DONGHAI COUNTY AOBO QUARTZ PROD