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Goods three-dimensional rotating stand structure for vacuum coating

A vacuum coating and product technology, applied in the direction of vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of moving to the outside of the furnace, time-consuming and labor-intensive, etc., to increase uniformity, and the disassembly process is simple and fast Effect

Pending Publication Date: 2022-04-12
SHENZHEN SENFUNG VACUUM PLATING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the unreasonableness of the existing turret structure, when the workpiece is installed on the turret, the entire turret needs to be moved outside the furnace for installation, and then the second turret is pushed into the furnace with a cart after it is filled with workpieces. Inner docking, the whole process is time-consuming and laborious, and also involves the disassembly and assembly of multiple parts, so there is room for improvement

Method used

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  • Goods three-dimensional rotating stand structure for vacuum coating
  • Goods three-dimensional rotating stand structure for vacuum coating
  • Goods three-dimensional rotating stand structure for vacuum coating

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Embodiment Construction

[0029] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0030] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. In describing the present invention, it should be understood that the t...

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PUM

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Abstract

The invention discloses a three-dimensional goods rotating stand structure for vacuum coating. The three-dimensional goods rotating stand structure comprises a first rotating disc, a first rotating shaft, a first planetary transmission mechanism, a second rotating disc, a supporting rod and goods hanging frames. The goods hanging rack comprises a core rod, a supporting seat, a second rotating shaft, a goods rod and a second planetary transmission mechanism; according to the structure, the first inserting hole and the shifting column are arranged on the first rotating shaft, the second inserting hole is formed in the second rotating disc, the second inserting hole is a non-circular hole, correspondingly, the upper end of a core rod of the goods hanging frame is made into a shape capable of being matched with the second inserting hole in an inserted mode, and the limiting column is arranged on the second rotating shaft of the goods hanging frame. The second rotating shaft can be inserted into the first inserting hole, the shifting column can abut against the limiting column, and therefore the whole goods shelf can be put into and taken out of a furnace at will, and the whole disassembling and assembling process is simple, fast, convenient and flexible.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a three-dimensional turntable structure for goods used in vacuum coating. Background technique [0002] In vacuum coating, the coating workpiece needs to be suspended in the coating vacuum furnace through a hanger for vacuum coating, and in order to make the coating uniform on all sides of the workpiece, a rotatable turntable is currently used to hang the workpiece. Due to the unreasonableness of the existing turret structure, when the workpiece is installed on the turret, the entire turret needs to be moved outside the furnace for installation, and then the second turret is pushed into the furnace with a cart after it is filled with workpieces. Inner docking, the whole process is time-consuming and laborious, and also involves the disassembly and assembly of multiple parts, so there is room for improvement. Contents of the invention [0003] The present invention aims ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50
Inventor 赵洁
Owner SHENZHEN SENFUNG VACUUM PLATING
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