Electromechanical device with adjustable resonant frequency
An electromechanical device and frequency technology, applied in circuits, electrical components, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve problems such as limited scope
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[0093] figure 1 Schematically shows an electromechanical device 1 comprising an elastic wave resonator 2 comprising a single interface transducer T I and a single resonant frequency tuned transducer T T . This case is presented for comparison purposes to better illustrate the interest of equipping such a resonator with several interface transducers and several tuning transducers along the The propagation paths C cross each other.
[0094] The device 1 consists of lithium niobate LiNbO 3 The fabricated solid piezoelectric substrate, as cross-section X, serves as a propagating support for surface acoustic waves propagating on the surface of the substrate. The resonator 2 can be made by depositing a metal layer (here an aluminum layer) on the free surface of the substrate and then by performing photolithography and etching of this layer in such a way as to delimit the two reflections Devices R1 and R2, transducer T T and T I The electrodes and the contact areas make it po...
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