Wide-range pressure measurement diaphragm capsule
A wide range and pressure technology, applied in the field of wide range pressure measurement bellows, can solve the problems of low precision, low measurement range value, high measurement accuracy, etc., and achieve the effect of improving the range ratio and taking into account the measurement accuracy
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Embodiment 1
[0043] Such as figure 1 As shown, a wide-range pressure measurement bellows includes two or more capacitive differential pressure sensor modules 100 and two pressure conduction channels, the measurement range of each of the differential pressure sensor modules 100 increases sequentially, and the measurement The measurement ranges of two differential pressure sensor modules 100 with adjacent ranges partially overlap, so as to obtain continuous ranges.
[0044] Such as figure 2 The differential pressure sensor module 100 is provided with two sealed sensing cavities 130 separated by a diaphragm 120 , and each of the sensing cavities 130 is respectively connected with a pressure introduction tube 160 . The two pressure introduction tubes 160 of each differential pressure sensor module 100 correspond to the two pressure conduction channels respectively, and all the pressure introduction tubes 160 corresponding to the same pressure conduction channel correspond to the same pressur...
Embodiment 2
[0059] Such as figure 1 , 3 , 4 and 8, a pressure measurement device includes the pressure measurement bellows as in Embodiment 1, and the pressure measurement bellows includes two cylindrical differential pressure sensor modules 100 . A pressure introduction seat 200 is arranged under the two differential pressure sensor modules 100, and a boss is arranged on the pressure introduction seat 200, and the two differential pressure sensor modules 100 are arranged side by side above the boss.
[0060] combine Figure 4~6 It can be seen that the pressure induction seat 200 is provided with a pressure introduction channel 210 corresponding to the two pressure introduction tubes 160 respectively, and the upper ends of the two pressure introduction channels 210 are opened on the upper surface of the boss of the pressure introduction seat 200 The lower ends of the two pressure introduction channels 210 are respectively opened on a pair of opposite side walls of the pressure introduct...
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