Method and system for controlling lifting mechanism of air transport vehicle

Abstract

The invention provides a method and system for controlling a lifting mechanism of an air transport vehicle, which are applied to the technical field of semiconductor wafer manufacturing equipment.The method for controlling the lifting mechanism of the air transport vehicle comprises the steps that when the air transport vehicle runs to a preset position in a track, the lifting mechanism is started to drive a clamping mechanism; therefore, the clamping mechanism does lifting motion; and acquiring a speed value of the lifting motion, and performing segmented control on the lifting motion of the clamping mechanism according to the speed value of the lifting motion. The speed of the lifting motion is acquired in real time, and the lifting motion is subjected to stable and rapid segmentation control according to the real-time speed, so that the whole lifting motion runs stably, the running stroke perimeter is obviously optimized, the wafer carrying efficiency in automatic application of a semiconductor factory is greatly improved, and the wafer production efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor wafer manufacturing equipment, in particular to a method and system for controlling the lifting mechanism of an aerial transport vehicle in an automatic material handling system. Background technique [0002] The aerial transport vehicle in the automatic material handling system (AMHS, Automatic Material Handling System, also known as the crane system) needs to move the target clamping object from one place to the set position as required. Since the aerial transport vehicle runs above the production equipment, it is therefore The aerial transport vehicle includes a relatively fixed lifting mechanism and a liftable clamping mechanism, and then the lifting mechanism controls the lifting of the clamping mechanism, so that the clamping mechanism reaches a predetermined position to pick up the target item (such as a wafer box), Movements such as transport and release. [0003] In the existing ae...

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Problems solved by technology

[0003]In the existing aerial transport vehicles, due to production needs, belts are often used to achieve flexible connection between the clamping mechanism and the lifting mechanism, and the flexible characteristics of the belt make the lifting mechanism In the process of lowering the clamping mechanism, the clamping mechanism shakes and swings to a certain extent relative to the lifting mechanism, so the clamping mechanism cannot accurately reach the predetermined position corresponding to the target item to clamp or release the target item. In order to accurately reach the predetermined position, the position of the clamping mechanism needs to be adjusted several times, which prolongs the clamping or releasing time of the target item, resulting in a longer cycle of the entire clamping or releasing action and affecting production efficiency

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