WAT automatic re-measurement method

Abstract

The invention discloses a WAT automatic retest method, and belongs to the technical field of integrated circuit testing. The method specifically comprises the following steps: step 1, a test device selects retest setting and configuration information, wherein the configuration information comprises a data configuration file related to a test; selecting and loading a wafer to be tested; 2, the test equipment executes the main test process to obtain an initial test result; step 3, the test equipment automatically executes a retest analysis system according to the retest setting, and analyzes the initial test result to obtain a retest item list; 4, if the retest item list is empty, not executing the retest process, and continuing to execute the main test process; otherwise, the test equipment executes a retest process; and re-testing the content of the re-testing item list, and continuing to execute the main testing process after re-testing. According to the invention, automatic retest of test items with unstable test results in the wafer electrical property test process can be realized, and the test efficiency and the test precision are greatly improved.

Description

technical field [0001] The invention belongs to the technical field of integrated circuit testing, and in particular relates to a WAT ​​automatic retesting method. Background technique [0002] The integrated circuit manufacturing process is complex and lengthy. From a single semiconductor wafer to a finished wafer, it often needs to go through dozens or even hundreds of processes. During the entire manufacturing process, any process step deviation or environmental changes will affect the final product performance of the integrated circuit chip. and finished products. Therefore, the electrical test of the wafer runs through the entire integrated circuit production process and is an important part of chip manufacturing. It is irreplaceable to control the product yield, reliability and production process by extracting and analyzing the effective information of the test data. and very effective means. Wafer electrical testing plays a very important role in yield monitoring an...

AI Technical Summary

Problems solved by technology

This method will cost a lot of labor costs, and there will be missed retest items, which greatly reduces the test efficiency. It is necessary to provide a convenient and fast retest method to achieve high-efficiency wafer testing.

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