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Two-dimensional material heterojunction thermoelectric device and preparation method thereof

A technology of two-dimensional materials and thermoelectric devices, which is applied in the manufacture/processing of thermoelectric devices, junction lead-out materials of thermoelectric devices, etc., which can solve the problems of limited application and difficult to effectively characterize the thermoelectric properties of van der Waals heterojunctions.

Pending Publication Date: 2022-05-24
SHENZHEN HANKE NEW MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the thermoelectric properties of van der Waals heterojunctions formed by two-dimensional layered materials such as graphene are difficult to be effectively characterized, which limits the further application of two-dimensional van der Waals heterojunctions as thermoelectric devices.

Method used

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Examples

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Embodiment Construction

[0024] In order to facilitate understanding of the present invention, the present invention will be described more fully below. Preferred embodiments of the present invention are presented herein. However, the present invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that a thorough and complete understanding of the present disclosure is provided.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terms used herein in the description of the present invention are for the purpose of describing specific embodiments only, and are not intended to limit the present invention. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. As used herein, "multiple" includes two and more ...

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Abstract

The invention discloses a preparation method of a two-dimensional material heterojunction thermoelectric device and the two-dimensional material heterojunction thermoelectric device. The preparation method of the two-dimensional material heterojunction thermoelectric device comprises the following steps: forming a two-dimensional material heterojunction on a substrate, wherein the two-dimensional material heterojunction is formed by laminating raw materials comprising two different two-dimensional layered materials; forming photoresist for shielding the heterojunction of the two-dimensional material on the base material, wherein the photoresist is electron beam sensitive photoresist; irradiating the preset region of the photoresist by adopting an electron beam to form an etching opening for exposing part of the two-dimensional material heterojunction; the two-dimensional material heterojunction is etched through the etching opening; etching the opening to prepare a metal electrode; and removing the photoresist. According to the preparation method, the metal electrode can be formed between the two-dimensional material heterojunctions with small sizes, and the metal electrode can be used as a contact and is further electrically connected to an external test circuit through a lead.

Description

technical field [0001] The invention relates to the technical field of thermoelectric devices, in particular to a two-dimensional material heterojunction thermoelectric device and a preparation method thereof. Background technique [0002] Two-dimensional layered materials represented by graphene have attracted great attention due to their many special properties. The structure of two-dimensional layered materials is a single-layer lattice without dangling bonds, so adjacent two-dimensional layered materials can usually be weakly bonded by van der Waals forces, and stacks of different two-dimensional layered materials can form Artificial heterostructures with atomically flat interfaces are often referred to as van der Waals heterojunctions in two-dimensional materials. [0003] Recently, more researches on two-dimensional layered materials have focused on the thermoelectric properties of materials represented by graphene, black phosphorus, and dichalcogenides. For practica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L35/34H01L35/14H10N10/01H10N10/851
CPCH10N10/851H10N10/01
Inventor 易典王荣福
Owner SHENZHEN HANKE NEW MATERIAL TECH CO LTD