Leveling platform for bearing probe card
A probe card and platform technology, which is applied in the field of probe card detection, can solve the problems of detection probe card performance error, worktable offset, etc., and achieve the effects of improving accuracy, not easy to tilt and shake, and improving leveling accuracy
Inactive Publication Date: 2022-05-31
深圳市森美协尔科技有限公司
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Problems solved by technology
[0004] In view of the above-mentioned related technologies, the inventor believes that the probe needs to be in contact with the sensor during the detection process, which may easily cause the workbench to shift and cause errors in the performance of the detection probe card
Method used
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Embodiment Construction
[0038] The following is attached Figure 1-5 The application is described in further detail.
[0039] This application provides a leveling platform for probe cards, refer to figure 1 , the leveling platform includes a base 2 and a measuring platform 1, the measuring platform 1 is a rectangular platform, the center of the measuring platform 1 is provided with a measuring hole 11, and the measuring hole 11 is a circular hole, the central position of the measuring platform 1 in the embodiment of the present application Refers to the center of the measurement hole 11, that is, the geometric center of the measurement platform 1; the probe card is placed on the measurement platform 1, the needle of the probe card is inserted into the measurement hole 11, and the measurement platform 1 is set directly above the base 2. Refer to figure 1 and figure 2 , the base 2 includes at least three support columns 21, the embodiment of the present application provides three support columns 21,...
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The invention discloses a leveling platform for bearing a probe card, which comprises a base, a measuring table for preventing the probe card, a driving mechanism for driving the measuring table to be close to or far away from the base and at least three leveling devices for leveling the measuring table, and the distances between the plurality of leveling devices and the central position of the measuring table are equal. The leveling device is located between the measuring table and the base and comprises a fixing base, a leveling ball and a connecting assembly used for being connected with the measuring table and the leveling ball. The fixed seat is installed above the base, a leveling groove is formed in the fixed seat, the leveling groove horizontally extends along the position close to the center of the measuring table, and the leveling ball is installed on the fixed seat in a sliding mode and located in the leveling groove so that the measuring table can be leveled. The method and the device have the effect of reducing errors in detecting the performance of the probe card.
Description
technical field [0001] The present application relates to the field of probe card detection, in particular to a leveling platform for carrying probe cards. Background technique [0002] The probe card is a test interface, which mainly tests the bare core, and tests the parameters of the chip by connecting the test machine and the chip and transmitting signals. [0003] The probe card includes the substrate and the probes on the substrate. When the probe card is used, the probe must be in contact with the chip to be tested, so the performance of the probe needs to be tested; when the probe card is tested, the probe card is generally placed On the workbench, through the sensor approaching and contacting the probe card, the surface of the probe will be worn after many tests, so it is necessary to polish the probe to keep the surface of the probe smooth, and the corresponding probe will be carried out after the probe is polished. Needle performance testing. Detect the relative...
Claims
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Login to View More IPC IPC(8): G01R1/067G01R31/28
CPCG01R1/067G01R31/28
Inventor 陈亮刘世文瞿高峰
Owner 深圳市森美协尔科技有限公司