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Multi-step measurement method

A measurement method, the technology of step 3, applied in the direction of measuring devices, comprehensive factory control, instruments, etc., can solve the problems of uncorrectable and different errors, and achieve the effect of reducing data errors, saving system computing power, and reducing the number of repeated inputs

Active Publication Date: 2022-06-24
沈阳和研科技股份有限公司
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The entire operation process not only needs to set the preset number of repetitions, but also the error of each step measurement is different and cannot be corrected

Method used

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Experimental program
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Embodiment Construction

[0046] The present invention will be described in detail below with reference to the accompanying drawings.

[0047] refer to Figure 1-Figure 5 , a multi-step measurement method, characterized in that: the steps of the measurement method include:

[0048] Step 1: Select a symbol pattern near the cutting lane of the material that can reflect the area as a cutting lane as the target pattern, and input the target pattern into the cutting machine control system; the system uses the target pattern as the identification object of the cutting lane, By comparing the target pattern with the image collected during the scanning process, the coordinates of the cutting track in the image are recorded;

[0049]Step 2. Set the distance d that the camera lens needs to scan, that is, the Y-axis size of the material;

[0050] Step 3: Preliminarily scan the web, and calculate the stepping distance of the camera lens according to the target pattern set in step 1; the Y-axis size of the image c...

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Abstract

The invention belongs to the technical field of stepping methods of automatic cutting equipment, and particularly provides a multi-stepping measurement method. The multi-step measurement method comprises the following specific steps: registering a target pattern; setting a camera lens scanning distance; calculating the stepping distance of a camera lens; the camera lens scans the material sheet according to the stepping distance, and a captured image is matched with a target pattern; intercepting a maximum translation amount data set; extracting translation data, aligning the translation data with the original data, and integrating comparison data; calculating a mean square error of each group of data to obtain a data set of a first block and a stepping number of the data set; according to the data set of the first block in the seventh step and the stepping number of the data set, the stepping data in one block of the tool and the cycle index of each data are calculated. According to the method, automatic measurement stepping of equipment can be realized, and the stepping measurement efficiency is greatly improved; and averaging each corresponding stepping coordinate in all blocks to reduce the error of the measurement data.

Description

technical field [0001] The invention belongs to the technical field of stepping methods of automatic cutting equipment, and particularly provides a multi-step measuring method. Background technique [0002] Automation equipment has been widely used in the industrial field. With the advancement of information technology and the popularization of electronic devices, semiconductor processing has become the forefront of today's industrial technology. At present, the automated cutting equipment on the market is gradually unable to meet the strong demand for semiconductor processing. [0003] At present, the data collection and setting of the cutting steps of the common automatic cutting equipment on the market are manually completed by the staff. First manually move the lens to the current cutting lane, record the coordinate position x of the first data point, then move the lens to the next cutting lane, record the coordinate position y of the second data point, and move the to...

Claims

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Application Information

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IPC IPC(8): G06V10/74G06K9/62G06T7/00G06T7/11G01B11/04
CPCG06T7/11G06T7/0004G01B11/043G06F18/22Y02P90/02
Inventor 袁慧珠张明明孟繁滨魏哲徐双双石文
Owner 沈阳和研科技股份有限公司