Micropore wall imaging apparatus and method of using same

Abstract

The invention discloses a micro hole wall imaging device which comprises an inclined composite mirror, a light guide mirror is fixedly installed under the composite mirror, a reflecting mirror is fixedly connected to the lower portion of the light guide mirror, an image zooming module is fixedly installed over the composite mirror, a CCD imaging module is fixedly installed over the image zooming module, and the CCD imaging module is fixedly connected to the lower portion of the light guide mirror. The image zooming module comprises two convex lenses which are arranged along the same vertical axis and are different in size. By arranging the reflective mirror, the light guide mirror, the reflecting mirror, the image zooming module, the CCD imaging module and the like, a clear image of the micro hole wall can be obtained, an illumination light path and an imaging light path are separated, the influence of stray light is avoided, the hole wall image definition is improved, meanwhile, the unique reflective mirror design can avoid the light explosion phenomenon, and the imaging precision is improved. And clear imaging is finally carried out on the interiors of the micro holes.

Description

technical field [0001] The present invention relates to the technical field of optical imaging devices, and in particular, to a micro-hole wall imaging device and a method for using the same. Background technique [0002] In the process of workpiece processing and inspection, it is often necessary to detect the information of the groove or the inner wall of the opening to ensure the qualified rate of the workpiece processing. However, due to the limitation of the shape or size of the workpiece itself, it is sometimes difficult to directly detect the opening. Or slotting information, usually requires the use of imaging equipment into the tiny hole walls. [0003] However, the existing technology center lacks a large depth of field and a small hole wall primary imaging equipment and system, so the existing equipment system is not clear on the inner wall of the hole, and the illumination is not enough, and the 360-degree imaging of the hole wall needs to go deep into the hole a...

AI Technical Summary

Problems solved by technology

[0003] However, the existing technology center lacks primary imaging equipment and systems for large depth-of-field micro-hole walls, so the existing equipment systems cannot image the inner walls of the holes clearly, and the illumination is not enough. At the same time, the 360-degree primary imaging of the hole walls needs to go deep into the hole and rotate a circle. The structure is complex and difficult to operate, and the defects of the inner hole wall rely on manual supplementation, and the reliability consistency cannot be guaranteed

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