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Detection device

A technology for detecting equipment and probes, used in the direction of measuring electricity, measuring devices, measuring electrical variables, etc.

Pending Publication Date: 2022-07-15
STAR TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Test time and cost are very relevant as test requirements and conditions increase, especially as temperature ranges increase

Method used

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Embodiment Construction

[0132] The following description of the disclosure, along with the accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the disclosure, although the disclosure is not limited to such embodiments. In addition, the following embodiments may be appropriately integrated with the following embodiments to complete another embodiment.

[0133] It will be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various elements, components, regions, layers and / or sections, These elements, components, regions, layers and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a "first element", "component", "region", "layer" or "section" discussed below may be referred to as a second element, components, regions, layers or section...

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Abstract

The present disclosure provides a probing device that uses a pressurized fluid to control test conditions. The probe device has a housing configured to define a test chamber, an element holder located on the housing and configured to clamp and support at least one element to be tested, a platen located on the housing and configured to hold at least one probe, a probe card holder located on the platen and configured to hold the at least one probe, and at least one flow line. The probe card holder is located on the platen and configured to clamp a probe card having the probe, and the at least one flow line is located in the probe card holder. The flow line is configured to allow a fluid to flow therein to adjust the temperature of the element to be measured.

Description

[0001] This application claims priority to, and benefits from, US Official Application Serial No. 17 / 145,738, filed January 11, 2021, the contents of which are incorporated herein by reference in their entirety. technical field [0002] The present disclosure relates to a detection apparatus of a semiconductor element. In particular, it relates to a probing device for semiconductor components using pressurized fluid to control test conditions. Background technique [0003] In general, testing the electronic properties of integrated circuit components at the wafer level is performed to confirm whether the integrated circuit components meet product specifications. Select integrated circuit components with electronic characteristics that meet product specifications for the subsequent packaging process, and discard other components to avoid additional packaging costs. Test time and cost are highly correlated as test needs and conditions increase, especially as temperature range...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26
CPCG01R31/26H01L21/67109H01L21/67248G01R31/2874G01R1/07314G01R31/2862G01R31/2865
Inventor 刘俊良潘承文刘荣杰
Owner STAR TECH INC