Vacuum pump
A vacuum pump and stator technology, applied in pumps, axial flow pumps, pump components, etc., can solve problems such as inability to rotate and achieve the effect of reducing temperature deviation
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Deformed example 1
[0082] Figure 7 It is a figure which shows the modification 1 of this embodiment. In Modification 1, the O-ring 42 is arranged between the outer peripheral surface of the stator 22 and the inner peripheral surface of the base 30 like a shaft seal. Even when the O-ring 42 is arranged in this manner, the reverse flow of the gas as indicated by the dotted arrow G can be prevented. exist Figure 7 In the above, the O-ring groove 31 is provided in the base 30 , but it may also be provided in the stator 22 . Likewise, in figure 2 In the structure shown, the O-ring groove 31 may be provided on the side of the flange portion 22a.
Deformed example 2
[0084] Figure 8 It is a figure which shows the modification 2 of this embodiment. In Modification 2, the parallel pins 44 are used instead of the stepped pins 40 . Similar to the stepped pin 40 , the parallel pin 44 is formed of a material having a lower thermal conductivity than the stator 22 and the base 30 . The structure of the pin hole 32 into which the parallel pin 44 is inserted is the same as figure 2 The pin holes 32 shown are of the same construction. That is, the pin hole 32 has a small-diameter hole portion 321 that engages with the parallel pin 44 and a large-diameter hole portion 322 that forms a gap with the parallel pin 44 . In the case of this structure, the flange portion 22 a of the stator 22 is supported by the plurality of parallel pins 44 , thereby positioning the stator 22 in the pump axis direction.
[0085] In addition, in Modification 2, the positioning of the stator 22 with respect to the radial and circumferential phases is, for example, as fo...
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