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Vacuum pump

A vacuum pump and stator technology, applied in pumps, axial flow pumps, pump components, etc., can solve problems such as inability to rotate and achieve the effect of reducing temperature deviation

Pending Publication Date: 2022-07-26
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In a turbomolecular pump, the rotor rotates at high speed with a gap between it and the stator. However, reaction products during etching accumulate inside the pump and eventually fill the gap between the rotor and the stator and fix them. Therefore, rotation may not be possible.

Method used

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  • Vacuum pump
  • Vacuum pump
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Examples

Experimental program
Comparison scheme
Effect test

Deformed example 1

[0082] Figure 7 It is a figure which shows the modification 1 of this embodiment. In Modification 1, the O-ring 42 is arranged between the outer peripheral surface of the stator 22 and the inner peripheral surface of the base 30 like a shaft seal. Even when the O-ring 42 is arranged in this manner, the reverse flow of the gas as indicated by the dotted arrow G can be prevented. exist Figure 7 In the above, the O-ring groove 31 is provided in the base 30 , but it may also be provided in the stator 22 . Likewise, in figure 2 In the structure shown, the O-ring groove 31 may be provided on the side of the flange portion 22a.

Deformed example 2

[0084] Figure 8 It is a figure which shows the modification 2 of this embodiment. In Modification 2, the parallel pins 44 are used instead of the stepped pins 40 . Similar to the stepped pin 40 , the parallel pin 44 is formed of a material having a lower thermal conductivity than the stator 22 and the base 30 . The structure of the pin hole 32 into which the parallel pin 44 is inserted is the same as figure 2 The pin holes 32 shown are of the same construction. That is, the pin hole 32 has a small-diameter hole portion 321 that engages with the parallel pin 44 and a large-diameter hole portion 322 that forms a gap with the parallel pin 44 . In the case of this structure, the flange portion 22 a of the stator 22 is supported by the plurality of parallel pins 44 , thereby positioning the stator 22 in the pump axis direction.

[0085] In addition, in Modification 2, the positioning of the stator 22 with respect to the radial and circumferential phases is, for example, as fo...

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Abstract

The invention provides a vacuum pump which can reduce temperature deviation in a cylindrical part of a stator heated by a heating part. A vacuum pump is provided with: a rotor cylinder section (13); step pins (40) as a plurality of heat insulation pins; and a stator (22) having a stator cylindrical portion (22b) disposed on the outer peripheral side of the rotor cylindrical portion (13) with a predetermined interval therebetween, and a flange portion (22a) fixed to the base (30) via the plurality of heat insulation pins, the heat insulation pins being lower in thermal conductivity than the stator (22) and the base (30), and supporting the flange portion (22a).

Description

technical field [0001] The present invention relates to a vacuum pump. Background technique [0002] Turbomolecular pumps are used as exhaust pumps for various semiconductor manufacturing apparatuses, but when exhaust is performed in an etching process or the like, reaction products accumulate inside the pump. In a turbomolecular pump, the rotor rotates at high speed with a gap between the rotor and the stator. However, the reaction products during etching accumulate inside the pump and eventually fill the gap between the rotor and the stator and are fixed to each other. Therefore, the rotating operation may not be possible. In order to suppress the accumulation of products inside the pump, for example, in the vacuum pump described in Patent Document 1, refer to Patent Document 1. Figure 1 to Figure 3 It is assumed that the stator 22 is supported by the cylindrical heat insulating member 24 and the stator 22 is directly heated by the heater 280 . [0003] [Prior Art Litera...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D19/04F04D29/08F04D29/58
CPCF04D19/042F04D29/582F04D29/083F04D29/5853F04D29/644
Inventor 木村裕章
Owner SHIMADZU SEISAKUSHO CO LTD