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Segmented grating coupler with inverted curvature sections

A technology for grating couplers, segments, applied in instrumentation, optics, light guides, etc., which can solve the problems of unrobust manufacturing variability, low efficiency, and lack of compactness

Pending Publication Date: 2022-07-29
GLOBALFOUNDRIES U S INC MALTA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional grating couplers may be inefficient or lack compactness and may not be robust to manufacturing variability

Method used

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  • Segmented grating coupler with inverted curvature sections
  • Segmented grating coupler with inverted curvature sections
  • Segmented grating coupler with inverted curvature sections

Examples

Experimental program
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Embodiment Construction

[0049] refer to figure 1 , 2 And in accordance with embodiments of the present invention, the structure 10 includes a grating coupler 12 and a waveguide core 14 adjacent to the grating coupler 12 . The waveguide core 14 may include cones proximate the grating coupler 12 . The grating coupler 12 and the waveguide core 14 are located on and above the dielectric layer 13 . The grating coupler 12 may include grating structures or segments 22 separated by grooves 23 . The waveguide core 14 can be aligned with the longitudinal axis 24 and the segments 22 can be aligned with and separated by the grooves 23 along the longitudinal axis 24 . In one embodiment, the segments 22 may be spaced with a uniform pitch and uniform duty cycle to define a periodic arrangement. In alternative embodiments, the segments 22 may be spaced apart at non-uniform pitches and / or non-uniform duty cycles to define an apodized (ie, non-periodic) arrangement.

[0050] The grating coupler 12 and the wavegui...

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PUM

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Abstract

The invention relates to a segmented grating coupler with inverted curvature sections. A structure including a grating coupler and a method of forming a structure including a grating coupler are disclosed. The grating coupler includes segments spaced along a longitudinal axis. Each segment is inclined with respect to the longitudinal axis. Each segment includes a first curved section having a first curvature and a second curved section having a second curvature inverted relative to the first curvature.

Description

technical field [0001] The present invention relates to photonics chips, and more particularly, to structures including grating couplers and methods of forming structures including grating couplers. Background technique [0002] Optoelectronic chips are used in many applications and systems, such as data communication systems and data computing systems. Optoelectronic chips integrate optical components (such as waveguides, optical switches, grating couplers, and polarizers) and electronic components (such as field-effect transistors) into a unified platform. Among other factors, by integrating both types of components in an optoelectronic chip, layout area, cost, and operational overhead can be reduced. [0003] Grating couplers are commonly used in optoelectronic chips to provide antennas in Light Detection and Ranging (LIDAR) systems and in silicon photonics phased arrays. The grating coupler can direct off-chip laser pulses or receive laser pulses at a given transmit an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/124
CPCG02B6/12G02B6/124G02B2006/12107G02B2006/12147G02B6/13
Inventor 亚历克·哈蒙德卞宇生米歇尔·拉科斯基李袁熙阿西夫·J·乔杜里R·A·安葛尔
Owner GLOBALFOUNDRIES U S INC MALTA