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Deformable mirror device and mfg. method thereof

A technology of deformable mirrors and mirrors, applied in installation, optics, instruments, etc., can solve the problems of complex manufacturing process of deformable mirror devices, damage to SRAM12, etc.

Inactive Publication Date: 2004-10-20
SAMSUNG ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the manufacture of the deformable mirror device, if defects occur in the manufacturing process of forming mirror hinges 14, mirrors 18, etc. on the upper surface of the SRAM 12, the SRAM 12 will be damaged.
Moreover, multiple layers must be sequentially formed on the upper surface of the substrate 11, complicating the manufacturing process of the deformable mirror device.

Method used

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  • Deformable mirror device and mfg. method thereof
  • Deformable mirror device and mfg. method thereof
  • Deformable mirror device and mfg. method thereof

Examples

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Embodiment Construction

[0023] see image 3 A deformable mirror device according to one embodiment of the present invention includes a substrate 30 having an address scanning circuit (not shown), and a pair of electrodes 33a and 33b in the form of stripes on the upper surface of the substrate 30. A post 39 is formed between the electrodes 33a and 33b on the substrate 30 . The post 39 is vertically connected to the substrate 30 and can be elastically bent.

[0024] Reflecting mirror 37 is combined with the upper end of column 39 . The reflection mirror 37 is a two-layer structure composed of a support plate 35 and a reflection plate 36 formed on the support plate 35 . The support plate 35 faces the electrodes 33a and 33b, and the angle of the mirror 37 varies according to the static electricity between the support plate and the electrodes 33a and 33b. Also, the reflection plate 36 reflects incident light.

[0025] A through-hole 40 passing through the post 39 is formed in the mirror 37 . The refl...

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PUM

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Abstract

A manufacturing method of a deformable mirror device includes the steps of forming an electrode layer on a substrate in a predetermined pattern, forming a thick film on the upper surfaces of the substrate and the electrode layer, forming a support plate on the upper surface of the thick film, and partially etching the thick film to form at least one through hole, separating the support plate into single portions, forming a post on one side of the inner surface of the through hole, forming a reflecting plate on the upper surface of the support plate, and removing the thick film.

Description

technical field [0001] The present invention relates to a deformable mirror device and its manufacturing method, in particular to a deformable mirror device with large effective reflection surface and simple structure and its manufacturing method. Background technique [0002] Such as figure 1 As shown, a typical deformable mirror device has a plurality of mirrors 1, each of which is connected to a column 2 by a hinge 3. Each reflector 1 is electrostatically rotated to reflect incident light according to the color angle. Deformable mirrors are used in video display devices for projection televisions, and optical scanning devices for scanners, copiers, and fax machines. The mirrors 1 of the deformable mirror device are arranged in a two-dimensional manner, and there is one mirror at each pixel. Each reflector 1 reflects light according to the respective pixel signal, thereby controlling color and brightness. [0003] exist figure 2 The manufacturing method of the US Pat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/015G02B26/08
CPCG02B26/0841G02F1/015
Inventor 崔范圭金容权辛宗祐
Owner SAMSUNG ELECTRONICS CO LTD