Method for preparing ferroelectric thin film / thick film
A ferroelectric thin film and ferroelectric film technology, applied in metal material coating process, coating, liquid chemical plating and other directions, can solve the problem of inability to achieve densification, difficulty in ferroelectric thick film arrays, and ferroelectric microcrystalline distribution. Non-uniformity and other problems, to achieve the effect of uniform thickness
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example 1
[0023] Example 1 prepares the method for barium strontium titanate (BST) thick film, comprises:
[0024] (1) Etching out groove array 1 on silicon substrate 2 with common wet chemical method or dry method, such as reactive ion etching or plasma etching, groove plane is square (500 * 500 microns), The groove depths are 10 microns and 20 microns, respectively, as shown in Figure 1(a) and Figure 1(b);
[0025] (2) First prepare barium strontium titanate (BST) sol with a concentration of 0.4mol / L, part of which is dried into a gel, and undergoes heat treatment at 500°C to 700°C to obtain BST ferroelectric micropowder, or through the usual chemical Co-precipitation method to obtain BST ferroelectric powder, then mix BST ferroelectric powder with BST sol, the weight ratio is 1:1, ball mill or stir for 1-2 hours, to obtain BST powder sol, the powder particle size is 0.5-2 μm;
[0026] (3) An appropriate amount of BST powder sol is dropped on the substrate 2, and a BST thick film is ...
example 2
[0030] Example 2 prepares the method for lead zirconate titanate (PZT) thick film, comprises:
[0031] (1) Etch the groove array 4 on the silicon wafer substrate by wet chemical method, the groove plane is square (500×500 micron) and rectangular (500×1000 micron), and the groove depth is 20 micron, as shown in Figure 2 (a) and Figure 2(b);
[0032] (2) First prepare lead zirconate titanate (PZT) sol, the concentration of which is 0.6mol / L, a part of which is dried into a gel, and undergoes heat treatment at 500°C-700°C to obtain PZT ferroelectric micropowder, and then mix it with PZT The sols are mixed with a weight ratio of 1.5:1, and ball milled for 1 to 2 hours to obtain a PZT powder sol with a particle size of 0.5 to 2 μm;
[0033] (3) An appropriate amount of PZT powder sol is dropped on the substrate 2, and a PZT thick film is prepared by a tape casting method. The blade 3 in the tape casting equipment is closely attached to the substrate 2 on the grooved side. After th...
example 3
[0036] Example 3 prepares the method for barium strontium titanate (BST) thin film, comprises:
[0037] (1) Etch groove array 5 on silicon wafer substrate 2 by wet chemical method, groove plane is square (500*500 micron), section C-C becomes trapezoidal, groove depth is 2 micron, as shown in Fig. 3 (a ) and Figure 3(b);
[0038] (2) First prepare barium strontium titanate (BST) sol with a concentration of 1mol / L, part of which is dried into a gel, and undergoes heat treatment at 500°C to 700°C to obtain BST ferroelectric micropowder, or obtain it by chemical co-precipitation method BST ferroelectric micropowder, then mix BST ferroelectric micropowder with BST sol, the weight ratio is 2:1, and ball mill for 1-2 hours to obtain BST powder sol, the powder particle size is 0.5~2 μm;
[0039] (3) An appropriate amount of BST powder sol is dropped on the substrate 2, and a BST film is prepared by a casting method. The blade 3 in the casting equipment is closely attached to the subs...
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