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Coating equipment

A technology of coating equipment and gears, which is applied in the field of coating equipment with process monitoring function, can solve the problems that the accuracy of film thickness monitoring cannot be effectively improved, the number of coating layers cannot be satisfied, and there are errors in the coating conditions of test components and substrates. Accuracy, improve production pass rate, reduce cost effect

Inactive Publication Date: 2006-01-04
PRODISC TECH INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, when using the existing coating equipment, due to the relative position of the test component and the coating source and the relative position of the substrate and the coating source have a considerable degree of difference (as mentioned earlier), the coating conditions of the test component and the substrate will vary. As a result, the accuracy of film thickness monitoring cannot be effectively improved; in addition, the number of coating layers allowed by a single test component may not be able to meet the number of coating layers required in the multi-layer coating process

Method used

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Embodiment Construction

[0019] Hereinafter, a coating device according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

[0020] Please refer to image 3 As shown, the coating equipment 1 of the preferred embodiment of the present invention includes a power unit 11 , a transmission mechanism 12 , a monitoring mechanism 13 , a substrate carrying mechanism 14 and a coating source 15 .

[0021] The power unit 11 has a rotation axis 111 . In this embodiment, the power unit 11 is a motor, and it may have a speed control component 112 and a torque protection component 113, and the speed control component 112 may be an existing controller for controlling the speed of the power unit 11; The torque protection component 113 can be a coupling (Coupler) with a torque limit, which is used to connect the rotating shaft 111 and the transmission mechanism 12. When the torque is greater than the rated torque range of the power unit 11, the torque prote...

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Abstract

The present invention relates to a film coating equipment, and said equipment includes a power unit, a driving mechanism, a monitoring mechanism, a baseboard bearing mechanism and a film-coating source, in which the power unit has a rotary shaft centre, said driving mechanism includes a first gear and a second gear, the first gear is placed on the ratory shaft centre and the second gear is meshed with first gear, and the centre of the second gear has a first opening, and the monitoring mechanism has at least two test components, the baseboard bearing mechanism is connected with the second gear and has a second opening, said second opening is placed opposite to the first opening, the monitoring mechanism is passed through and placed in first opening and second opening, and the film-coating source is placed opposite to baseboard bearing mechanism and test components.

Description

technical field [0001] The invention relates to a coating device, in particular to a coating device with a process monitoring function. Background technique [0002] Coating technology has a wide range of applications in the industry, and its application fields span metal processing industry, semiconductor industry, and optoelectronic industry. Due to the rapid development of semiconductor industry and optoelectronic industry in recent years, coating technology has also made significant progress. [0003] Such as figure 1 As shown, the existing coating equipment 3 includes a motor 31 , an umbrella-type substrate supporting mechanism 32 , a test piece fixing mechanism 33 and a coating source 34 . Wherein, the umbrella-type substrate carrying mechanism 32 is usually composed of a plurality of substrate-carrying seats 321, and the umbrella-type substrate carrying mechanism 32 is arranged on the axis of the motor 31, and the coating source 34 is opposite to the umbrella-type su...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/52C23C14/54
Inventor 徐振源廖为松谢治洪
Owner PRODISC TECH INC