Method for constructing well structures for hybrid optical waveguide and the optical waveguide
A technology of optical waveguide and optical core, applied in the direction of optical waveguide light guide, light guide, optics, etc., can solve the problem of reduction of optical signal transmission
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[0036] Reference attached figure 1 In the cross-sectional view of , the substrate 14 may be covered by the lower cladding layer 10 . The lower cladding layer can be a material such as silicon. The optical core 12 may form ridges or lines on the lower cladding 10 . Such as figure 1 As shown, the axis of the ridge is positioned perpendicular to the transverse plane. The optical core can be, for example, a silicon doped with germanium or an oxynitride material.
[0037] Such as figure 2 As shown, a thin seed layer 16 of metallic material such as nickel is formed across the optical core 12 and lower cladding layer 10 . In one embodiment, the metal 16 may be deposited. A first mask is formed on the seed layer 16 using standard photolithography processes. Then the seed layer 16 is etched into the required pattern, as attached image 3 Shown in cross section. Wet etching is very advantageous for this etching process because the seed layer 16 can be completely removed from t...
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