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Thallum-based high-temperature superconductive film material and its preparation method

A high-temperature superconducting thin film and superconducting thin film technology, applied in the usage of superconducting elements, the manufacture/processing of superconducting devices, superconducting devices, etc. Conductive film and other problems, to achieve the effect of uniform and flat surface morphology and good epitaxy characteristics

Inactive Publication Date: 2007-05-23
NANKAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

No mention of Tl 2 Ba 2 CaCu 2 o 8 The method of making superconducting thin films, also did not mention the structure, critical current density, and surface resistance of Tl-Ba-Ca-Cu-O thin films

Method used

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  • Thallum-based high-temperature superconductive film material and its preparation method
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  • Thallum-based high-temperature superconductive film material and its preparation method

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Embodiment

[0036] The Tl-Ba-Ca-Cu-O amorphous precursor thin films were prepared by DC magnetron sputtering. FIG. 1 is a schematic diagram of a magnetron sputtering apparatus. In the figure, two sputtering targets 1 are placed symmetrically. The thin film substrate substrate 2 is placed on a rotatable substrate holder 3 .

[0037] The sputtering target 1 was produced by a 2-step method. First use BaO 2 , CaO and CuO are matched according to the ratio of atomic ratio Ba: Ca: Cu = 2: 1: 2, after uniform mixing and grinding, calcined for 10 hours in a flowing oxygen atmosphere at a temperature of 900 ℃, and then carefully ground after cooling. It was fired for another 10 hours under the conditions to obtain BaCaCuO powder. Then, the BaCaCuO powder was mixed with Tl 2 O 3 The powders were mixed and ground carefully, pressed into tablets, sealed with a crucible, and fired in a flowing oxygen atmosphere at a temperature of 850°C for 1 hour. After cooling, it was carefully ground and tab...

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Abstract

The invention relates to Tl2Ba2CaCu2O8 (Tl-2212) superconducting film and its making method. Its superconducting change temperature is higher than 100K; the critical current density is greater than 1000000 A / sq cm at 77K; at 77K and at 10GHz, its surface resistance is less than 1m Ohm. Its thickness is between 10-1000nm. Its making method mainly two steps; first, depositing Tl-Ba-Ca-Cu-O non-crystalline pioneer film; second, making the high-temperature treatment to convert the non-crystalline pioneer film into the superconducting film. The invention resolves the method to make large area double-sided Tl-2212 extended superconducting film, which can make microwave passive devices or other superconducting electronic ones.

Description

technical field [0001] The invention relates to a preparation method of a high-temperature superconducting thin film material, which is a thallium-based high-temperature superconducting material, in particular to a Tl-Ba-Ca-Cu-O superconducting material thin film, in particular to a Tl-based high-temperature superconducting material 2 Ba 2 CaCu 2 O 8 (Tl-2212) Preparation method of superconducting material thin film. Background technique [0002] High-quality high-temperature superconducting thin films are of great significance in the application of superconducting electronic devices, especially microwave passive devices. In practical applications, the superconducting transition temperature of the superconducting material is required to be at least one-third higher than the working temperature, and has a high critical current density and low microwave surface resistance. In the application of microwave passive devices, it is required to make high-quality double-sided fil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L39/12H01L39/24H01B12/06H01B13/00C04B35/00
CPCY02E40/642Y02E40/60
Inventor 阎少林方兰何明路荣涛
Owner NANKAI UNIV
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