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Vacuum pump

A technology for vacuum pumps and pump casings, applied in pumps, pump components, axial flow pumps, etc., can solve problems such as rising costs and achieve the effect of reducing costs

Inactive Publication Date: 2003-06-25
英国博克爱德华兹技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] In addition, as a method for narrowing the width of the gap g2, it is also conceivable to form the stator column 14 in the shape of the outer wall following the shape of the inner wall of the rotor 16-1. In this case, it is necessary to prepare several outer walls. Models with different shapes and the replacement of the stator column 14, which contains expensive electrical components, etc., have the problem of causing a significant cost increase in the manufacture of turbomolecular pumps.

Method used

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Embodiment Construction

[0027] Hereinafter, an embodiment of a vacuum pump suitable for the present invention will be described in detail with reference to the drawings.

[0028] figure 1 It is a longitudinal sectional view showing the overall structure of the vacuum pump of the present invention. As shown in the figure, the pump mechanism of the vacuum pump P1 is composed of a turbomolecular pump mechanism PA and a screw groove pump mechanism PB housed inside the pump housing 11. Composite pump mechanism.

[0029] First, the pump housing 11 is made up of a cylinder 11-1 and a base 11-2 installed on its lower end. The upper wall of the cylinder 11-1 opens into a gas suction port 12. In the gas suction port 12, there is no Vacuum containers such as the process chamber shown in the figure are fixed by bolts on the flange portion of the cylinder body 11-1, and the gas exhaust port 13 is opened on the lower side wall surface of the base 11-2, and the exhaust pipe 13-1 is closed. Install.

[0030]In a...

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Abstract

A vacuum pump is provided with a spacer so as to reduce the large gap formed between an inner wall of a rotor and an outer wall shape of a stator column into a predetermined small gap, when the rotor having a different diameter is mounted. A spacer Sn having an inner wall shape Sna adapted to an outer wall shape 14a of the stator column 14 and an outer wall shape Snb adapted to an inner wall shape 16-na of the rotor 16-n is detachably fixed on the stator column 14 outer periphery. The interval gn between the stator column 14 outer wall surface and the rotor 16-n inner wall surface is set to be a predetermined interval gl.

Description

technical field [0001] The present invention relates to vacuum pumps that can be used in semiconductor manufacturing equipment, electron microscopes, surface analysis equipment, mass analysis equipment, particle accelerators, nuclear fusion experimental equipment, etc., and particularly relates to simple and inexpensive vacuum pumps that require large-capacity exhaust. corresponding structure. technical background [0002] In the past, as in the process of dry etching or CVD in the semiconductor manufacturing process, in the process of processing in a high vacuum process chamber, the gas in the process chamber is exhausted to form a certain high vacuum degree. is to use e.g. Figure 6 A vacuum pump like the turbomolecular pump shown. [0003] As shown in the figure, the turbomolecular pump P6 is provided with a plurality of vane-shaped rotor blades 17, 17... on the outer wall of the cylindrical rotor 16, and a plurality of stators fixed between the rotor blades 17, 17 The ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D19/04
CPCF04D19/042F04D29/584F04D19/04
Inventor 野中学桦泽刚志
Owner 英国博克爱德华兹技术有限公司