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Large range nanometer grade step piezoelectric micromotion working platform, and its driving and controlling system

A technology of working platform and drive control, which is applied in the general control system, control/regulation system, electrical program control, etc., and can solve the problems of high price and difficult application

Inactive Publication Date: 2005-11-09
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the piezoelectric motor has reached the level of application, it is difficult to apply in a wider range due to its high price. Changing the structure of the motor and selecting appropriate materials can further reduce the cost of the motor

Method used

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  • Large range nanometer grade step piezoelectric micromotion working platform, and its driving and controlling system
  • Large range nanometer grade step piezoelectric micromotion working platform, and its driving and controlling system
  • Large range nanometer grade step piezoelectric micromotion working platform, and its driving and controlling system

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Embodiment Construction

[0023] The following drawings describe the present invention in detail.

[0024] Embodiments of the present invention's large-stroke nanoscale step-pitch piezoelectric micro-motion working platform:

[0025] Such as figure 1 As shown, the piezoelectric micro-motion working platform of the present invention includes a platform 3 , a guide rail block 5 , a base, two clampers 2 , and two drivers 1 . Among the two clamps, the clamp on the left in the figure is C 1 , the clamp on the right in the figure is C 2 . Among the two drives, the drive on the left in the figure is A 1 , the drive on the right in the figure is A 2 . Consists of a clamper and a driver to form a unit. Because the principles, structures and functions of the two units are exactly the same, the two units are placed symmetrically, which not only increases the driving force of the micro-motion working platform, but also increases the stability of the operation, and the structure is simple. , easy to install...

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Abstract

A piezoelectrically micromoving working platform with big stroke (more than 10 mm) and nanostep is composed of platform, base, guide track on said platform, guide track block moving along said guide track, and the driver unit arranged at the end of said guide track block and consisting of clamper and driver. Said clamper can be extended or shrinked when electric current flows through it, so performing the clamping and releasing actions.

Description

technical field [0001] The invention relates to nano-measurement and nano-positioning, in particular to a piezoelectric micro-motion working platform with a large-stroke nano-scale step distance. It is suitable for the field of nanotechnology, especially in the fields of nanomachining, nanometer measurement, electronic device production, micro electromechanical system, nanomaterials, biomedicine and so on. Background technique [0002] Micro-drive and positioning technology is a hot topic in the research of various countries in the world today, and it is one of the key technologies in nanometer measurement and processing technology. No matter it is nanometer measurement or nanometer positioning, a microdrive system is required. The performance of the micro-drive directly affects the accuracy of measurement or positioning. The so-called micro-driver refers to devices and devices that can produce micro-drive. Micro drive is an important part of micro drive and positioning sy...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q1/25
Inventor 赵美蓉林玉池
Owner TIANJIN UNIV
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