Coating device and method

A coating device and coating head technology, which is applied to the surface coating liquid device, spray device, coating, etc., can solve the problem of difficulty in drawing the paste pattern into the desired shape and position

Inactive Publication Date: 2006-03-22
HITACHI PLANT TECH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As a result, thermal stress due to thermal expansion occurs in the door frame, m

Method used

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  • Coating device and method
  • Coating device and method
  • Coating device and method

Examples

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Example Embodiment

[0014] Example 1

[0015] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, although an example of a device for drawing a paste pattern (sealing material pattern) on the substrate surface is described, it can also be applied to a dropping device that uses a gate-shaped frame structure to drop liquid crystal on the substrate.

[0016] figure 1 It is a perspective view showing an embodiment of the paste coater of the present invention. In addition, in order to avoid troubles, the numbers of the respective parts of the plurality of coating heads arranged oppositely are appended with a to f to the numbers of the parts in the following description.

[0017] One side end of each frame (beam) 2a, 2b is fixed to the supporting leg 31a or the linear motor 4b so that it cannot move in the X-axis direction. In addition, the other end side of each beam 2a, 2b is supported by thermal expansion guide rails 25a, 25b movabl...

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PUM

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Abstract

With the upsizing of devices, a door-shaped framework comprising a plurality of coating heads deforms due to heat expansion and the precision of coating positions is reduced, thus the problem of incapability of precisely coating is raised. Therefore, the invention adopts the technical proposal that: one side of the framework is fixed, the other side of the framework is supported by a straight-action linear guide rail which can be moved along the length direction of the framework, thereby heat stress (the bending of the framework) caused by the heat expansion does not happen in the framework; meanwhile, position deviations of heads caused by the heat expansion are corrected by means of a primary standard calculating heat expansion capacity.

Description

technical field [0001] The present invention relates to a coating device or a coating method for coating a paste or dropping liquid crystal on a substrate in a flat panel manufacturing process. Background technique [0002] As a prior art, as described in JP-A-7-275770, there is a structure in which a glass substrate is placed on a stage movable in the XYθ direction so that the main surface of the glass substrate faces the ejection nozzle of the nozzle. outlet, the paste filled in the paste storage cylinder is discharged from the discharge port onto the substrate, and at the same time, the relative positional relationship between the substrate and the nozzle is changed, thereby coating the paste in a desired shape on the substrate pattern. [0003] In the above-mentioned prior art, in the field of flat panels such as LCDs, the size of the glass substrate has been greatly increased, and the coating range of the coating head has also been expanded. As a result, the gate frame...

Claims

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Application Information

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IPC IPC(8): B05B13/04G05D3/20
CPCB05C5/0225B05D1/26G02F1/1339
Inventor 石田茂松本清司松井淳一川隅幸宏山间伸也
Owner HITACHI PLANT TECH LTD
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