Coating device and method

Abstract

With the upsizing of devices, a door-shaped framework comprising a plurality of coating heads deforms due to heat expansion and the precision of coating positions is reduced, thus the problem of incapability of precisely coating is raised. Therefore, the invention adopts the technical proposal that: one side of the framework is fixed, the other side of the framework is supported by a straight-action linear guide rail which can be moved along the length direction of the framework, thereby heat stress (the bending of the framework) caused by the heat expansion does not happen in the framework; meanwhile, position deviations of heads caused by the heat expansion are corrected by means of a primary standard calculating heat expansion capacity.

Description

technical field

[0001] The present invention relates to a coating device or a coating method for coating a paste or dropping liquid crystal on a substrate in a flat panel manufacturing process. Background technique

[0002] As a prior art, as described in JP-A-7-275770, there is a structure in which a glass substrate is placed on a stage movable in the XYθ direction so that the main surface of the glass substrate faces the ejection nozzle of the nozzle. outlet, the paste filled in the paste storage cylinder is discharged from the discharge port onto the substrate, and at the same time, the relative positional relationship between the substrate and the nozzle is changed, thereby coating the paste in a desired shape on the substrate pattern.

[0003] In the above-mentioned prior art, in the field of flat panels such as LCDs, the size of the glass substrate has been greatly increased, and the coating range of the coating head has also been expanded. As a result, the gate frame...

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