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Laser and jet flow compound polishing method and device

A compound polishing and laser polishing technology, which is applied in laser welding equipment, other manufacturing equipment/tools, welding equipment, etc., can solve the problems of low polishing efficiency, low material removal rate, and affecting processing quality, so as to achieve high polishing quality and improve Polishing efficiency, the effect of avoiding thermal stress

Active Publication Date: 2018-05-08
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, pure jet polishing and laser polishing still have certain technical limitations.
The material removal rate of jet polishing is low, resulting in low polishing efficiency; laser polishing uses the photothermal coupling effect of laser beam to directly produce material removal, which will have a certain thermal effect on the workpiece to be processed, resulting in a certain thermal stress in the workpiece after processing. Affects the processing quality to a certain extent

Method used

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  • Laser and jet flow compound polishing method and device
  • Laser and jet flow compound polishing method and device
  • Laser and jet flow compound polishing method and device

Examples

Experimental program
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Effect test

Embodiment 1

[0048] BK7 with a thickness of 100mm × 100mm and a thickness of 10mm was used as the workpiece 9 to be processed, and its initial surface morphology was measured as figure 2 As shown, the initial surface roughness Sq value is 7.032nm. Select the BK7 workpiece of the same material and size as the spot-collecting part, place it on the positioning plate 11, and fix it by the fixing plate 10, turn on the laser polishing module separately, make the energy modulation of the laser light source 2 the lowest, and focus the laser beam 4 to the sample spot. Spot lower surface. Gradually increase the energy of the laser light source 2, and detect whether the surface shape of the spot-collecting piece changes. If there is no change, the energy of the laser light source 2 is further increased until the surface shape changes, and the parameters of the laser light source at this time are used as the processing parameters in the laser jet composite polishing process.

[0049] Replace the sp...

Embodiment 2

[0052] The implementation steps of this embodiment are basically the same as those in Embodiment 1. The main difference is that the material of the workpiece to be processed is fused silica, the energy of the laser light source in the polishing process is different, and the surface morphology of the fused silica workpiece before composite polishing is as follows: Figure 4 As shown, the surface roughness Sq value is 140.5nm; the surface morphology of the fused silica workpiece after composite polishing is as follows Figure 5 As shown, the surface roughness Sq value is 4.388nm, indicating that the composite polishing method of the present invention effectively improves the surface precision of the fused silica workpiece.

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Abstract

The invention discloses a laser and jet flow compound polishing method and device. According to the method and the device, by regulating a focusing lens of a laser polishing module, a laser beam is converged to the surface of a to-be-machined workpiece to form a laser beam focal spot; a jet flow beam generated by conveying a polishing solution through a pressure supply pump, making the polishing solution flow through a nozzle and ejecting out the polishing solution through the nozzle impacts on the surface of the to-be-machined workpiece to form a jet flow beam impacting area; and by means ofa mechanical structure, it is ensured that the laser beam focal spot and the jet flow beam impacting area overlap, and therefore the relative positions of the jet flow beam impacting area, the laser beam focal spot and the to-be-machined workpiece are changed, and the compound polishing process of the surface of the to-be-machined workpiece is completed. By means of the method and the device, thebottleneck problems that in the conventional polishing technology, thermal stress and the machining efficiency are low are solved, the ultra-precision polishing efficiency is improved, and meanwhile the polishing quality is improved.

Description

technical field [0001] The invention belongs to the field of ultra-precision polishing in the field of mechanical processing, and in particular relates to a laser jet composite polishing method and device. Background technique [0002] As the last process of ultra-precision finishing, ultra-precision polishing undertakes the tasks of determining the surface shape of the workpiece, improving the machining accuracy of the workpiece surface, and reducing the machining damage of the workpiece surface. There are many existing ultra-precision polishing methods, such as magnetorheological polishing, ion beam polishing, airbag polishing, jet polishing, laser polishing, etc. Compared with other polishing technologies, both jet polishing and laser polishing have unique advantages such as a wide range of machinable materials and strong adaptability to the shape of the workpiece. [0003] Oliver W. Fahnle et al. of Delft University in the Netherlands proposed a jet polishing technology...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P23/00B23K26/352
CPCB23K26/0093B23K26/352
Inventor 张连新孙鹏飞李建李明吴祉群
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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