The invention discloses a three-dimensional
diffraction female die high-speed
direct writing system based on dynamic focusing, which relates to the technical field of
laser direct writing and comprises a
data processing module, a focusing control module, an
energy modulation module, a scanning execution module, an error sensing module and an error compensation module. The
data processing module receives three-dimensional
point cloud data, the optimal focusing position is calculated according to the local curvature of a current scanning point, and the focusing control module drives the piezoelectric
ceramic micro-displacement table to enable a focus to accurately fall on the surface of the scanning point; the error sensing module synchronously collects actual
light spot center coordinates when
laser pulses are emitted every time, and the error compensation module corrects driving
voltage through closed-
loop control after comparison so as to eliminate focus drift. All the modules of the
system work cooperatively, precise matching of focuses and scanning point contours is achieved, error accumulation is avoided, the
direct writing speed and precision are considered, high-speed precise direct writing of the three-dimensional
diffraction female die is achieved, the direct writing spatial resolution and the contour recarving precision are improved, and the stability of the focuses is guaranteed.