Preparation method of magneto-resistor film for improving accuracy of electronic compass

An electronic compass and magnetoresistance technology, which is applied in the field of preparation of magnetic multilayer films, achieves the effects of improving precision, improving sensitivity, and facilitating preparation

Inactive Publication Date: 2006-07-26
UNIV OF SCI & TECH BEIJING
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Problems solved by technology

[0006] The purpose of the present invention is to provide a new magnetoresistance film material structure to solve the problem of improving the accuracy of the electronic compass

Method used

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  • Preparation method of magneto-resistor film for improving accuracy of electronic compass

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Embodiment 1

[0012] Example 1: Preparation of a magnetic multilayer film in a magnetron sputtering apparatus. First, the single crystal Si (001) substrate was ultrasonically cleaned with organic chemical solvent and deionized water, and then mounted on the sample base of the sputtering chamber. The substrate is cooled by circulating water, and a magnetic field of 150-250 Oe is applied parallel to the direction of the substrate. Sputtering chamber background vacuum 3×10 -5 Pa, under the condition of argon gas (purity of 99.99%) pressure of 0.5 Pa during sputtering (Ni 0.81 Fe 0.19 ) 54 Cr 36 (50) / Ni 0.81 Fe 0.19 (300) / Ta(6); Then, the thin film is processed into a magnetoresistive sensor element with a line width of 30 microns through a general semiconductor processing technology. Combined with the semiconductor processing technology, the thickness of 8 microns Ni is deposited on both sides of the component parallel to the strip-shaped component. 0.81 Fe 0.19 film. Ni deposited 0.81 Fe 0.19 ...

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Abstract

This invention provides one process method for electromagnetic resistance film to improve compass accuracy, which compeers the following steps: First depositing Ni-Cr/NiFe/Ta on the clean glass slice or single silicon base slice; Then processing the film into magnetic resistance sensor elements with width as 2 to 50 micrometer through common process; then combining semiconductor to process element two sides bar parts with thickness of 3 to 10 micrometer. The process of the film is in the magnetic control splash device with vacuum degree as 1X10-5í½6X10-5Pa and splash argon gas pressure as 0.4 to 0.7 Pa and the base slice uses recycle water for cooling and the base slice direction is added with magnetic field of 150 to 2500e to induce one magnetic direction.

Description

Technical field [0001] The invention belongs to the technical field of preparation of magnetic multilayer films, and in particular provides a preparation method of a magnetoresistance film that improves the accuracy of an electronic compass. Background technique [0002] Electronic compasses can be made using magnetoresistive film materials. Electronic compasses are also called digital compasses, which are electronic devices that use the geomagnetic field to determine the north pole. Although GPS has a wide range of applications in navigation, positioning, speed measurement, and orientation, its signal is often blocked by terrain and ground objects, which greatly reduces the accuracy and even cannot be used. Especially in urban areas with high-rise buildings and densely-vegetated forests, the effectiveness of GPS signals is only 60%; and in stationary situations, GPS cannot give heading information. To make up for this shortcoming, a combined navigation and orientation method can...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L43/12
Inventor 于广华张辉腾蛟王立锦李希胜朱逢吾
Owner UNIV OF SCI & TECH BEIJING
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