Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for forming pattern and drop discharge apparatus

A manufacturing method and a technology of a discharge device, which are applied in the direction of a liquid injection device, a device for coating a liquid on a surface, a spray device, etc., can solve problems such as restrictions on the discharge method, and achieve the goals of improving material utilization, reducing costs, and increasing yield Effect

Inactive Publication Date: 2006-08-02
SEMICON ENERGY LAB CO LTD
View PDF0 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Absorptive media such as paper are different from normal inkjet that catches ink, and in FPD applications, it is often necessary to discharge onto a non-absorbent substrate, which creates restrictions on the discharge method.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for forming pattern and drop discharge apparatus
  • Method for forming pattern and drop discharge apparatus
  • Method for forming pattern and drop discharge apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0067] pass Figure 8 ~ Figure 11 Examples of the present invention will be described.

[0068] Figure 8 (A) is a step of forming a conductive cover film for forming a gate electrode and wiring.

[0069] A light-transmitting material such as glass or quartz is used as the substrate, but it is not limited to a light-transmitting material, and other substrates may be used as long as it can withstand the processing temperature in each step. The size of the substrate 1500 is preferably 600mm×720mm, 680mm×880mm, 1000mm×1200mm, 1100mm×1250mm, 1150mm×1300mm, 1500mm×1800mm, 1800mm×2000mm, 2000mm×2100mm, 2200mm×2600mm, or 2600mm×3100mm. The area substrate can reduce the manufacturing cost. On the substrate 10, a conductive film 11 of aluminum, titanium, tantalum, molybdenum, or the like is formed by a cover film forming unit including a nozzle body in which a plurality of discharge ports are arranged in a uniaxial direction. The discharged conductive material is preferably a condu...

Embodiment 2

[0087] Using the display device formed by implementing the present invention, such as Figure 13 Exemplary TV monitors, computers, video playback devices, and other electronic devices.

[0088] Figure 13 (A) is an example of a completed television display device to which the present invention is applied, and is composed of a housing 2001, a support base 2002, a display unit 2003, a speaker unit 2004, a video input terminal 2005, and the like. By using the present invention, it is possible to manufacture a television monitor having a screen size of type 30 or more at low cost. Furthermore, by using the device of the present invention, a television display can be completed.

[0089] Figure 13 (B) is an example of a completed notebook personal computer to which the present invention is applied, and is composed of a main body 2201, a casing 2202, a display unit 2203, a keyboard 2204, an external port 2205, a pointing mouse 2206, and the like. By using the present invention, ...

Embodiment 3

[0092] This example uses Figures 14 to 16 A method of filling a contact hole (open hole) with a droplet composition using a droplet discharge method will be described.

[0093] Figure 14 In (A), a semiconductor 3001 is provided on a substrate 3000 , an insulator 3002 is provided on the semiconductor 3001 , and the insulator 3002 has a contact hole 3003 . As a method for forming the contact hole, a known method may be used, and a droplet discharge method may also be used. In this case, the contact hole 3003 is formed by a method of discharging a wet etching solution from a nozzle. Thus, by the droplet discharge method, the formation of the contact hole and the formation of the wiring can be continuously performed.

[0094] Then, the nozzle 3004 is moved above the contact hole 3003, the droplet composition is continuously discharged from the contact hole 3003, and the contact hole 3003 is filled with the droplet composition ( Figure 14 (B)). Thereafter, by resetting the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention is characterized in having a process for forming a pattern by making a substrate having an insulating property, such as a liquid-repellent thin film over a substrate, such as a semiconductor film, selectively have affinity for liquid by plasma generating means 102, and discharging a drop compound to the surface having affinity for liquid by a drop discharging means 103. By putting the region having affinity for liquid, which was selectively formed, between liquid-repellent, a drop after drop landing can be formed without moving the drop landing portion

Description

technical field [0001] The present invention relates to a method for making a film pattern and a device for discharging liquid droplets. Background technique [0002] In recent years, the development of pattern making methods using droplet discharge methods by screen printing and inkjet techniques has been active. [0003] In the droplet discharge method, there are many advantages such as direct patterning that does not require a mask, easy application to large substrates, and high material utilization. Therefore, the use of fine patterning in FPDs (flat panel displays) is active. [0004] As its use, it is also reported to form not only the light-emitting layer of organic EL (electroluminescence) and the color filter of LCD (liquid crystal display), but also the electrode and organic transistor of PDP (plasma display). [0005] Although the droplet discharge method has many advantages, in practice, there are various restrictions on the droplets contai...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B05D1/26B05D3/04B05C5/00B05C9/10H01L21/027H01L21/3205H01L21/288H01L21/30B05B17/06H01L21/20H01L21/768H01L51/00H01L51/40
CPCH01L51/0004B05B17/0607H01L21/76877H01L21/288H01L51/0021H01L21/76838H10K71/13H10K71/60B05D1/26B05D3/04B05C5/00B05C9/10
Inventor 前川慎志山崎舜平
Owner SEMICON ENERGY LAB CO LTD