Thin film magnetic head and method of manufacturing same
a thin film, magnetic head technology, applied in the direction of metal sheet core heads, instruments, record information storage, etc., can solve the problems of inability to obtain sharp and precise photoresist patterns, inability to form top poles in desired shapes, and difficulty in forming photoresist films such as thick films with narrow pattern width, etc., to avoid the variation of the substantial width of the first magnetic layer.
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first embodiment
[0088] [First Embodiment]
[0089] A method of manufacturing a composite thin-film magnetic head as a method of manufacturing a thin-film magnetic head according to a first embodiment of the invention will be described with reference to FIGS. 1 to 8. The thin-film magnetic head of the embodiment will be shown specifically in the method of manufacturing the thin-film magnetic head of the embodiment and so that both will together be described in the followings. Each of FIGS. 1A to 7A shows a cross sectional view vertical to an air bearing surface and each FIGS. 1B to 7B shows a cross sectional view parallel to the air bearing surface of a top pole. FIG. 8 illustrates a plan structure of the composite thin-film magnetic head.
[0090] In the manufacturing method according to the embodiment, as shown in FIG. 1A and FIG. 1B, an insulating layer 2 made of alumina (Al.sub.2O.sub.3), for example, of about 3 to 5 .mu.m in thickness is deposited on a substrate 1 made of aluminum oxide and titanium ...
second embodiment
[0128] [Second Embodiment]
[0129] Next, a second embodiment of the invention will be described.
[0130] A method of manufacturing of a composite thin-film magnetic head as a method of manufacturing the thin-film magnetic head of the second embodiment will be described with reference to FIGS. 16A and 16B to FIGS. 19A and 19B. The thin-film magnetic head of the embodiment will be shown specifically in the method of manufacturing of the thin-film magnetic head of the embodiment and so that both will together be described in the followings. Each of FIG. 16A to FIG. 19A illustrates a cross sectional view orthogonal to the air bearing surface and each of FIG. 16B to FIG. 19B illustrates a cross sectional view parallel to the air bearing surface of the top pole area. In the figures, like numerals are adopted to the same elements as those in the above mentioned embodiment.
[0131] In the method of manufacturing the thin-film magnetic head according to the embodiment, the procedure of forming fro...
third embodiment
[0158] [Third Embodiment]
[0159] A third embodiment of the invention will be described in the followings.
[0160] FIG. 28 illustrates a plan structure of the top pole 27c and the top pole tip 27a in the third embodiment of the invention and FIG. 29 shows the main part of FIG. 28 being enlarged. In these figures, like numerals are adopted to the elements which are identical to those shown in FIG. 20 in the second embodiment, and description will be omitted when not necessary.
[0161] As shown in FIGS. 28 and 29, in the embodiment, the connecting area 27c(2) of the top pole 27c is extending to overlap a portion of the top area 27a(1) in such a manner that the edge face 22 thereof goes over the position of the step face 21 of the top pole tip 27a. The edge face 22 of the connecting area 27c(2) in the overlapping area is orthogonal to the extending direction of the top area 27a(1), that is, to the direction of the side face 23 of the top area 27a(1). Further, in the embodiment, TH0 position ...
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Abstract
Description
Claims
Application Information
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