Piezoelectric composite device, method of manufacturing same, method of controlling same, input-output device, and electronic device
a composite device and piezoelectric technology, applied in the direction of generator/motor, pulse technique, instruments, etc., can solve the problems of difficulty in integrating the two structures described above into one structure, requiring more mounting space, and difficulty in separation of voltages, etc., to achieve the effect of compact electronic devices
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[0085]FIGS. 1A and 1B are a perspective view and a sectional view of an example of structure of a multifunction piezoelectric actuator 1 according to the present invention.
[0086] The first embodiment includes: a first piezoelectric element joined between a feeding electrode and a common electrode; and a second piezoelectric element joined between the common electrode and a signal detecting electrode; wherein a predetermined voltage is supplied between the feeding electrode and the common electrode, and a force detection signal based on an external force is extracted from the detecting electrode. Thus a piezoelectric composite device can be provided which combines a piezoelectric bimorph type actuator vibrating on the basis of the predetermined voltage supplied between the feeding electrode and the common electrode, and a force detecting sensor outputting the force detection signal based on the external force.
[0087] The multifunction piezoelectric actuator 1 of a fixed connection ty...
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