Fixed volume valve system

a fixed volume valve and valve system technology, applied in the field of fluid valves, can solve the problems of reducing repeatability, house pressure/vacuum used to open the valves is often not well controlled, etc., and achieves the effect of reducing the effect of vacuum pressure on the displacement volume, and reducing the variability of the hold up volum

Inactive Publication Date: 2007-06-07
ENTEGRIS INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0009] Embodiments of the present invention provide an advantage by eliminating or reducing the variability of hold up volume caused by outside influences. For example, embodiments of the present invention provide an advantage by reducing the effects of vacuum pressure on the displa

Problems solved by technology

Some valve designs, however, exhibit characteristics that reduce repeatability.
The house pressure/vacuum used to

Method used

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  • Fixed volume valve system
  • Fixed volume valve system
  • Fixed volume valve system

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Embodiment Construction

[0027] Preferred embodiments of the present invention are illustrated in the FIGUREs, like numerals being used to refer to like and corresponding parts of the various drawings. To the extent dimensions are provided, they are provided by way of example for particular implementations and are not provided by way of limitation. Embodiments can be implemented in a variety of configurations.

[0028] Broadly speaking, embodiments of the present invention provide valves that are configured to have a fixed hold up volume once a threshold condition is met. For example, the valves can be configured to have a fixed holdup volume once a threshold pressure / vacuum is applied to open the valve.

[0029] According to one embodiment a valve can comprise a valve body defining a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage. The valve body, according to one embodiment, can be made of multiple pieces such as a pump body and a valve pla...

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PUM

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Abstract

Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.

Description

RELATED APPLICATIONS [0001] The present application claims under 35 U.S.C. 119(e) priority to and the benefit of U.S. Provisional Application No. 60 / 742,147, entitled “VALVE PLATE SYSTEM AND METHOD” by Iraj Gashgaee et al., filed Dec. 2, 2005, [Atty. Dkt. No. ENTG1770] which is hereby fully incorporated by reference herein.TECHNICAL FIELD OF THE INVENTION [0002] This invention relates generally fluid valves. More particularly, embodiments of the present invention relate to valves for multi-stage pumps. Even more particularly, embodiments of the present invention relate to a valve plate that reduces hold up volume. BACKGROUND OF THE INVENTION [0003] There are many applications for which precise control over the amount and / or rate at which a fluid is dispensed by a pumping apparatus is necessary. In semiconductor processing, for example, it is important to control the amount and rate at which photochemicals, such as photoresist chemicals, are applied to a semiconductor wafer. The coat...

Claims

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Application Information

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IPC IPC(8): F04B53/10
CPCF04B7/0275F04B25/00
Inventor GASHGAEE, IRAJCEDRONE, JAMESGONNELLA, GEORGE
Owner ENTEGRIS INC
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