Electrochemical Fabrication Process Including Process Monitoring, Making Corrective Action Decisions, and Taking Appropriate Actions
a technology of electrochemical fabrication and process monitoring, applied in the direction of acceleration measurement using interia force, waveguides, instruments, etc., can solve the problems of destructive separation of masking materials from substrates, and achieve the effect of improving build problem diagnostics
Inactive Publication Date: 2010-03-18
UNIV OF SOUTHERN CALIFORNIA
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Benefits of technology
The invention provides an electrochemical fabrication process for producing a three-dimensional structure from a plurality of adhered layers. The process includes selectively depositing layers onto a substrate and inspecting or analyzing the formation parameters of each layer to identify any potential build problems. If a problem is identified, the process allows for timely correction or replacement of the problematic layer to continue the fabrication process. This improves the efficiency and accuracy of the fabrication process and reduces waste of time and resources.
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[0055]FIGS. 1A-1G, 2A-2F, and 3A-3C illustrate various features of one form of electrochemical fabrication that are known. Other electrochemical fabrication techniques are set forth in the '630 patent referenced above, in the various previously incorporated publications, in various other patents and patent applications incorporated herein by reference, still others may be derived from combinations of various approaches described in these publications, patents, and applications, or are otherwise known or ascertainable by those of skill in the art from the teachings set forth herein. All of these techniques may be combined with those of the various embodiments of various aspects of the invention to yield enhanced embodiments. Still other embodiments may be derived from combinations of the various embodiments explicitly set forth herein.
[0056]FIGS. 4A-4I illustrate various stages in the formation of a single layer of a multi-layer fabrication process where a second metal is deposited o...
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Abstract
Electrochemical fabrication processes and apparatus for producing multi-layer structures include operations or means for providing enhanced monitoring of build operations or detection of the results of build operations, operations or means for build problem recognition, operations or means for evaluation of corrective action options, operations or means for making corrective action decisions, and operations or means for executing actions based on those decisions.
Description
RELATED APPLICATIONS[0001]This application is a continuation of U.S. patent application Ser. No. 10 / 995,609 (Microfabrica Docket No. P-US124-A-MF), filed Nov. 22, 2004 which in turn claims benefit of U.S. Provisional Patent Application No. 60 / 523,951 (Docket No. P-US069-A-MF), filed Nov. 20, 2003, and is a continuation-in-part of U.S. patent application Ser. Nos. 10 / 434,494 (Docket No. P-US057-A-SC), and 10 / 434,519 (Docket No. P-US068-A-MG), both filed on May 7, 2003. Application Ser. No. 10 / 434,494 claims benefit of U.S. Provisional Patent Application No. 60 / 379,132 (Docket No. P-US007-A-SC), filed on May 8, 2002 and application Ser. No. 10 / 434,519 claims benefit of U.S. Provisional Patent Application No. 60 / 379,130 (Docket No. P-US028-A-MG), filed on May 8, 2002. All of these applications are incorporated herein in their entireties as if set forth in full.FIELD OF THE INVENTION[0002]Embodiments of this invention relate to the field of electrochemical fabrication and the associated...
Claims
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IPC IPC(8): C25D21/12B81B3/00C25D1/00C25D5/02C25D5/12G01P15/08G01P15/125H01L21/288H01L21/48H01L21/768H01P1/202H01P3/06H01P5/18H01P11/00H05K3/24H05K3/46
CPCB81B2201/042C25D1/003G01P15/0802G01P15/125H01L21/2885H01L21/4857H01L21/76879H01P1/202H01P3/06H01P5/183H01P11/00H01P11/005H05K3/241H05K3/243H05K3/4647B81C99/004
Inventor COHEN, ADAM L.LOCKARD, MICHAEL S.SMALLEY, DENNIS R.KILGO, III, MARVIN M.
Owner UNIV OF SOUTHERN CALIFORNIA