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Electromagnetically coupled hermetic chamber

a hermetic chamber and electromagnetic coupling technology, applied in the field of sensors, can solve the problems of reducing the reliability of feedthrough, further exacerbated, and the volume change of the pressure reference does not substantially offset the pressure in the pressure reference, so as to reduce the sensitivity to external electromagnetic effects.

Inactive Publication Date: 2012-01-19
CARDIOMEMS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This solution enables reliable and durable sensors that maintain hermeticity, reducing drift and instability, and can be used in harsh and biological environments, such as medical implants, by eliminating a common failure point in hermetic seals and allowing for precise, accurate, and robust pressure sensing without compromising the hermetic seal.

Problems solved by technology

If the deflection of the diaphragm or plate is sufficiently small, the volume change of the pressure reference does not substantially offset the pressure in the pressure reference.
As is known in the art, such feedthrough locations are typically sites for failure of hermeticity.
This problem is further exacerbated when miniaturizing the sensor, since the total volume of material available for hermetic sealing shrinks proportionally and the reliability of the feedthrough is also greatly reduced.

Method used

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  • Electromagnetically coupled hermetic chamber
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  • Electromagnetically coupled hermetic chamber

Examples

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Embodiment Construction

[0028]Referring now to the drawings, in which like numerals indicate like elements throughout the several views, FIGS. 1 and 2 illustrate a sensor 2 comprising a sensor body 4. The sensor body 4 is formed from electrically insulating materials, particularly biocompatible ceramics and polymers. Suitable ceramic materials include glass, fused silica, sapphire, quartz, or silicon. Suitable polymeric materials include polyimide, liquid crystal polymer (LCP), urethane, polyester, Teflon, FEP, PTFE, polyamide and silicone rubber, treated or configured such that the permeation of these materials is reduced to a level such that leakage rates are commensurate with the definition of hermeticity provided herein. Additionally, the sensor 2 can incorporate radiopaque features to enable fluoroscopic visualization during placement within the body.

[0029]The sensor body 4 defines a hermetic chamber 6. One of the walls 7 defining the hermetic chamber 6 comprises a deflectable region 8 configured to d...

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Abstract

An electromagnetically coupled hermetic chamber includes a body defining a hermetic chamber. A distributed LC circuit is disposed within the hermetic chamber and a second conductive structure is attached to the body outside of the hermetic chamber. The distributed LC circuit is electromagnetically coupled to the second conductive structure without direct electrical paths thereby allowing coupling of the distributed LC circuit to external electronics without the need for electrical feedthroughs or vias that could compromise the integrity of the hermetic chamber.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application is a continuation application of U.S. Utility application Ser. No. 11 / 402,439, filed Apr. 12, 2006, which claims the benefit of U.S. Provisional Application No. 60 / 670,549, filed Apr. 12, 2005, which applications are herein incorporated by reference in their entirety.FIELD OF THE INVENTION[0002]The present invention relates to sensors comprising hermetic packaging that eliminates the need for electrical feedthroughs, and sensors configured utilizing the same, all of which are intended to perform reliably in harsh and biological environments.BACKGROUND OF THE INVENTION[0003]Over the past 20 years, advances in the field of microelectronics have enabled the realization of microelectromechanical systems (MEMS) and corresponding batch fabrication techniques. These developments have allowed the creation of sensors and actuators with micrometer-scale features. With the advent of the above-described capability, heretofore implaus...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): A61B5/00G01L9/00
CPCA61B5/03A61B5/021
Inventor ALLEN, MARK G.
Owner CARDIOMEMS