Closure or lock device for a vacuum chamber

Abstract

Closure device or lock device for a vacuum chamber comprisinga counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber,a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate,at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.

Description

TECHNICAL FIELD[0001]The present invention relates to a closure or lock device for a vacuum chamber with a counter plate which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber and a closure cover, which closes the opening in a sealing manner in a closed position against the counter plate. In addition, the invention relates to a method for sealing an opening of a vacuum chamber by means of such a closure or lock device.BACKGROUND[0002]Closure and lock devices for vacuum chambers are adequately known from the most recent background art. In this respect, for example, WO 2005 / 121621 A 1 describes a lock device according to this class for a lock opening arranged in a wall between a first and a second recipient as well as a shut-off device arranged in the interior space of the first recipient and a counter plate assigned to the shut-off device. The flange-like counter plate surrounding the opening is provided with a circumferential seal, against which the...

AI Technical Summary

Benefits of technology

The patent text describes a closure or lock device that can be used in various applications. The device includes a distance measuring device, such as sensors based on optical, magnetic, or capacitive measurement principles. These sensors can be placed close to the magnet device to improve accuracy and co-location between the two components. The distance sensor can measure the gap size between the counter plate and the closure cover with high precision. Overall, the patent provides a technical solution for accurately measuring distances and gaps in a closure or lock device.

Problems solved by technology

Applying an even and homogeneous pressing force across the entire seal is particularly difficult in the case of seals with a seal diameter of a few millimetres at a dimension of a shut-off element or a closure cover in the range of several decimetres or meters from a constructional and manufacturing-technology point of view.

The implementation of a lift of approximately 0.5 to 2 mm over the surface of the closure cover compressing the sealing ring at a range of 0.5 to 5 m2, for example, or beyond this, has been shown to be extremely expensive on a constructional and technical manufacturing level.

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