Closure or lock device for a vacuum chamber

Inactive Publication Date: 2018-11-29
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The patent text describes a closure or lock device that can be used in various applications. The device includes a distance measuring device, such as sensors based on optical, magnetic, or capacitive measurement principles. These sensors can be placed close to the magnet device to improve accuracy and co-location between the two components. The distance sensor can measure the gap size between the counter plate and the closure cover with high precision. Overall, the patent provides a technical solution for accurately measuring distances and gaps in a closure or lock device.

Problems solved by technology

Applying an even and homogeneous pressing force across the entire seal is particularly difficult in the case of seals with a seal diameter of a few millimetres at a dimension of a shut-off element or a closure cover in the range of several decimetres or meters from a constructional and manufacturing-technology point of view.
The implementation of a lift of approximately 0.5 to 2 mm over the surface of the closure cover compressing the sealing ring at a range of 0.5 to 5 m2, for example, or beyond this, has been shown to be extremely expensive on a constructional and technical manufacturing level.

Method used

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  • Closure or lock device for a vacuum chamber
  • Closure or lock device for a vacuum chamber
  • Closure or lock device for a vacuum chamber

Examples

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Embodiment Construction

[0065]The closure and lock device 10 shown as a cross-section in FIG. 1 is provided for arrangement at an opening 14 of a vacuum chamber 12. The closure or lock device 10 has a counter plate 16, which is typically connected to the wall 11 of the vacuum chamber 12 schematically indicated in FIG. 1. The counter plate 16 can be arranged flush with the opening 14 of the vacuum chamber 12 on the wall 11 or as an integral component of the vacuum chamber 12. In this respect, the counter plate 16 can also have an opening 14, which can typically coincide with the opening of the vacuum chamber 12.

[0066]As is evident in the overview in FIG. 2, 3, as well as 6 to 8, the considerably level closure cover 18 in this embodiment is mounted to a frame 15 by means of a plurality of restoring elements 82 in a slidable manner. Thereby, the slidability and the deflection of the restoring elements 82 result from a comparison of FIGS. 7 and 8. The frame 15 itself is, for example, swivel-mounted to the coun...

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PUM

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Abstract

Closure device or lock device for a vacuum chamber comprisinga counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber,a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate,at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.

Description

TECHNICAL FIELD[0001]The present invention relates to a closure or lock device for a vacuum chamber with a counter plate which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber and a closure cover, which closes the opening in a sealing manner in a closed position against the counter plate. In addition, the invention relates to a method for sealing an opening of a vacuum chamber by means of such a closure or lock device.BACKGROUND[0002]Closure and lock devices for vacuum chambers are adequately known from the most recent background art. In this respect, for example, WO 2005 / 121621 A 1 describes a lock device according to this class for a lock opening arranged in a wall between a first and a second recipient as well as a shut-off device arranged in the interior space of the first recipient and a counter plate assigned to the shut-off device. The flange-like counter plate surrounding the opening is provided with a circumferential seal, against which the...

Claims

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Application Information

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IPC IPC(8): B65D45/02
CPCB65D45/02F16K31/082F16K37/0041F16K51/02F16K1/2007F16K1/24F16K3/18F16K31/0679F16K1/2085
Inventor OLDENDORF, ULRICHKLESEN, CHRISTOF
Owner APPLIED MATERIALS INC
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