Film bulk acoustic resonators in thin ln-lt layers

a technology of acoustic resonators and films, applied in the direction of impedence networks, electrical equipment, etc., can solve the problems of not being able to meet the requirements of the proposed higher frequency use of existing technologies

Active Publication Date: 2021-02-25
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

These resonators achieve improved frequency selectivity and reduced parasitic modes, enabling better performance in higher frequency bands, such as those up to 28 GHz, by maximizing shear acoustic wave excitation and minimizing undesirable wave reflections and lateral acoustic modes.

Problems solved by technology

However, these existing technologies are not well-suited for use at the higher frequencies proposed for future communications networks.

Method used

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  • Film bulk acoustic resonators in thin ln-lt layers
  • Film bulk acoustic resonators in thin ln-lt layers
  • Film bulk acoustic resonators in thin ln-lt layers

Examples

Experimental program
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Embodiment Construction

[0022]FIG. 1 shows a simplified top view and a cross-sectional view of one period of a Y-cut film bulk acoustic resonator (YBAR) 100. The YBAR 100 is made up of a piezoelectric plate 110 having parallel front and back surfaces 112, 114, respectively. The piezoelectric plate is a thin single-crystal layer of a piezoelectric material such as lithium niobate (LN), lithium tantalate (LT), lanthanum gallium silicate, or gallium nitride. The piezoelectric plate is cut such that the orientation of the X, Y, and Z crystalline axes with respect to the front and back surfaces is known and consistent.

[0023]The back surface 114 of the piezoelectric plate 110 is attached to a substrate 120 that provides mechanical support to the piezoelectric plate 110. The substrate 120 may be, for example, silicon, sapphire, quartz, or some other material. The piezoelectric plate 110 may be bonded to the substrate 120 using a wafer bonding process, or grown on the substrate 120, or attached to the substrate in...

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Abstract

Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. A resonator device includes a single-crystal piezoelectric plate having a front surface and a back surface opposite the front surface, wherein the back surface is coupled to a surface of a substrate. A floating back-side conductor pattern is formed on a portion of the back surface. A front-side conductor pattern including two electrodes is formed on a portion of the front surface opposite the back-side conductor. A portion of the piezoelectric plate forms a diaphragm spanning a cavity in the substrate and the front-side conductor pattern is on the diaphragm

Description

RELATED APPLICATION INFORMATION[0001]This patent is a continuation of patent application Ser. No. 16 / 932,719, entitled FILM BULK ACOUSTIC RESONATORS IN THIN LN-LT LAYERS, filed Jul. 18, 2020, which claims priority from provisional patent application no. 62 / 875,855, entitled FILM ACOUSTIC RESONATORS IN THIN LN-LT LAYERS, filed Jul. 18, 2019, and provisional application no. 62 / 958,851, entitled YBAR ON ROTATED Y-CUTS OF LN, filed Jan. 9, 2020, the entire contents of each are incorporated herein by reference.NOTICE OF COPYRIGHTS AND TRADE DRESS[0002]A portion of the disclosure of this patent document contains material which is subject to copyright protection. This patent document may show and / or describe matter which is or may become trade dress of the owner. The copyright and trade dress owner has no objection to the facsimile reproduction by anyone of the patent disclosure as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright a...

Claims

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Application Information

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Patent Type & AuthorityApplications(United States)
IPC IPC(8): H03H9/205H03H9/56H03H9/02H03H9/13
CPCH03H9/205H03H9/564H03H9/02015H03H9/131H03H9/0211H03H9/174H03H9/02228H03H9/175H03H9/132H03H3/02H03H9/568
InventorPLESSKI, VIKTORKOSKELA, JULIUS
OwnerMURATA MFG CO LTD