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Coating apparatus for color drum filter

A coating equipment and filter technology, applied in optics, optical components, sputtering and other directions, can solve the problems of color drum filter design coating equipment, etc., to achieve the effect of increasing uniformity

Inactive Publication Date: 2007-09-19
PRODISC TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, there is currently no coating device designed for the color drum filter; therefore, how to provide a coating device that can effectively rotate and move the substrate of the color drum filter to increase the amount of light formed on the color drum filter. The uniformity of the coating layer on the substrate of the chip is one of the important issues of the current coating process technology

Method used

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  • Coating apparatus for color drum filter
  • Coating apparatus for color drum filter
  • Coating apparatus for color drum filter

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Embodiment Construction

[0045] The coating equipment of the color drum filter according to the preferred embodiment of the present invention will be described below with reference to the relevant drawings, wherein the same elements will be described with the same reference symbols.

[0046] Please refer to shown in Figure 4, according to the coating equipment 4 of the color drum filter of preferred embodiment of the present invention comprises a power unit 41, a first gear 42, several transmission units 43, a plurality of coating utensils 44, and At least one coating source 45 . In the present embodiment, the coating device 4 of the color drum filter has four transmission units 43, and each transmission unit 43 is respectively connected with six coating devices 44, so there are Twenty-four coating apparatus44. As shown in Figure 4, the first gear 42, the transmission unit 43, the coating device 44 and the coating source 45 are arranged in a coating cavity 46, and the power unit 41 is passed through ...

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Abstract

The invention relates to a coating layer equipment of forming on a color drum optical filter base plate at least, which comprises the following parts: a power unit, a first gear, at least one driving unit, one coating appliance and one coating source at least. The coating appliance can rotate at the central axis.

Description

technical field [0001] The invention relates to a coating device, in particular to a coating device for a color drum filter (colordrum filter). Background technique [0002] The coating process is widely used in the industry, and is generally used in the metal processing industry, semiconductor industry, and optoelectronic industry. In recent years, due to the rapid development of the semiconductor industry and the optoelectronic industry, significant progress has been made in coating technology. As shown in FIG. 1 , a conventional coating device 1 includes a motor 11 , an umbrella-type bearing seat 12 , a shutter 13 and a coating source 14 . Among them, the shaft of the umbrella-type bearing seat 12 is set on the axis of the motor 11, and the shape of the umbrella-type bearing base 12 is similar to an umbrella shape, which is usually composed of four bearing seats. Therefore, this coating equipment 1 is also called an umbrella. In the umbrella-type coating machine, the sh...

Claims

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Application Information

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IPC IPC(8): C23C14/22G02B5/23G02B1/10
Inventor 徐振源陈汉松廖为松陈明华李思贤
Owner PRODISC TECH INC
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