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Spherical microchannel board and production thereof

A micro-channel plate and flat technology, which is applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve the problems of unusable flat micro-channel plates, and achieve a stable and reliable preparation method and a simple and feasible process route. , the effect of changing the image quality

Inactive Publication Date: 2007-09-19
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in some application fields, the image surface of the rays (charged particles) that require detection or multiplication is a curved surface, such as a spherical surface, a parabolic surface, and a hyperboloid. Obviously, a planar microchannel plate cannot be used, and it is urgently needed to be solved in the current optical system. The technical problem is to provide a spherical microchannel plate

Method used

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  • Spherical microchannel board and production thereof
  • Spherical microchannel board and production thereof

Examples

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Effect test

Embodiment 1

[0023] In FIG. 1 , the structure of the spherical microchannel plate 1 is exactly the same as that of the planar microchannel plate 1 , but the shape is different. The thickness t of the spherical micro-channel plate 1 in this embodiment is 1.0 mm, and the shape of the spherical micro-channel plate 1 is that the middle part is a spherical crown, and the outer edge of the spherical crown is connected with a ring as a whole. The outer diameter D of the spherical microchannel plate 1 is 65 mm, the bottom surface diameter d of the spherical crown is 55 mm, the spherical radius R is 165 mm, R / d is 3, and the diameter of each microchannel is 10 μm.

[0024] Its preparation method is as follows:

[0025] 1. Prepare a planar microchannel plate according to the conventional method 4

[0026] The planar microchannel plate 4 is prepared according to the conventional method, that is, the core material of the solid mandrel is placed in a hollow glass tube, put into a heating furnace, and ...

Embodiment 2

[0034] In the present embodiment, the thickness t of the spherical microchannel plate 1 is 0.6 mm, the external diameter D of the spherical microchannel plate 1 is 35 mm, the bottom surface diameter d of the spherical cap is 25 mm, the spherical radius R is 20 mm, and R / d is 0.8, and the diameter of each microchannel is 10 μm.

[0035] In the preparation process, in the process step of fixing the planar microchannel plate 4 on the mould, the pressure generated by placing the counterweight 6 on the upper mould 5 is 10g / cm 2 , in the process step of making the protected area, it is reduced in a hydrogen furnace at 300°C for 6 hours. Other processing steps are identical with embodiment 1.

Embodiment 3

[0037] In the present embodiment, the thickness t of the spherical microchannel plate 1 is 1.5 mm, the external diameter D of the spherical microchannel plate 1 is 100 mm, the bottom surface diameter d of the spherical cap is 90 mm, the spherical radius R is 450 mm, and R / d is 5.0, and the diameter of each microchannel is 10 μm.

[0038] In the process step of fixing the planar microchannel plate 4 on the mould, the pressure generated by placing the counterweight 6 on the upper mould 5 is 20g / cm in the preparation process. 2 , in the process step of making the protected area, it is reduced in a hydrogen furnace at 350°C for 4 hours. Other processing steps are identical with embodiment 1.

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Abstract

The invention is a 0.6-1.5 mm thickness plate-like thing, whose middle part is a spherical cap edge integrates with an tourus. The form diameter of sphere microchannel plate is 35-100mm, and its basal diameter is 25-90mm. The ratio of radius to basal diameter is 0.8-5.0. The diameter of each microchannel is 10 um. The manufacturing method includes following steps: making the flat microchannel plate by normal method; fixing the flat microchannel plate on the positioner to make sphere microchannel plate and protected area. The invention can be used in detect device and multiplier.

Description

technical field [0001] The patent of the present invention belongs to the technical field of detection of x-rays, gamma rays, extreme ultraviolet rays and charged particles, and specifically relates to extreme ultraviolet detectors. technical background [0002] The planar microchannel plate is a kind of surface array microchannel electron multiplier. Each microchannel hollow tube is equivalent to a miniature dynode electron multiplier. A certain voltage is applied to both ends to obtain high electronic gain. [0003] The manufacturing process of the planar microchannel plate is to put the core material and the leather material together. The core material of the microchannel plate is a solid mandrel, and the leather material is a hollow glass tube. Pressed, sliced, and optically polished on both sides to form a planar microchannel plate. Because of its small size, light weight, and high electron gain, planar microchannel plates have been widely used in detection and multipl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J43/04H01J29/00H01J9/00
CPCH01J43/246
Inventor 赵宝升王俊锋邹玮
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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