Unitary removable shield assembly

Abstract

An apparatus for replacing consumables of a vacuum chamber. A unitary removable shield assembly (100) is provided to quickly replace consumables such as a shield (145, 150). The shield assembly can include an upper adapter assembly (110), at least one shield member (145, 150), a cover ring (155) and an insulator member (115). The shield assembly is designed so that the consumables can be replaced in one step and allows the chamber to continue with its maintenance cycle.

Description

technical field [0001] The present invention generally relates to shield assemblies for use in vacuum chambers. Background technique [0002] In semiconductor processing, particularly in physical vapor deposition, vacuum chambers are used to deposit materials on the surface of a substrate supported by a substrate support member. A target, usually made of a material such as titanium, aluminum, or copper, is fixed to a backing plate positioned above a vacuum chamber which is supplied with an inert gas such as argon. A DC or RF voltage is applied to the target to generate a plasma in the region between the substrate and the target to generate ions that bombard the target and cause target material to be sputtered onto the substrate. However, target material also deposits on chamber walls and chamber components such as substrate support members and becomes a source of contamination. Target material can accumulate and eventually flake off onto the substrate, which can create def...

AI Technical Summary

Problems solved by technology

As a result, there is significant downtime for the vacuum chamber in order to remove consumables, replace consumables, and reinstall components

As components are frequently removed and installed to replace shields, screws and components can rub against each other and create contamination in the vacuum chamber and cause defects on the substrate

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