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A polishing machine and method

A technology of equipment and components, applied in the field of polishing equipment

Inactive Publication Date: 2008-03-05
UNIV COLLEGE OF LONDON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this technique does not have the disadvantage of uncut material in the contact center area, it requires a complex structure involving two motors to provide rotation about two axes

Method used

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  • A polishing machine and method
  • A polishing machine and method
  • A polishing machine and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0068] Figure 1 is a perspective view of a polisher employing a soft tool according to one embodiment of the present invention.

[0069] The polishing machine includes a vibration-proof rigid platform 1 . An X-sliding mechanism that can move along the x direction is installed on platform 1. On the X-sliding mechanism 2, a Y-sliding mechanism 3 that can move along the y direction is installed. On the Y-sliding mechanism 3, a turntable 4 that can rotate along the c direction is installed. The turntable 4 is mounted on the Y-slide mechanism 3 through a z-direction movement mechanism (not shown) so that the turntable 4 can move in the z-direction. The turntable 4 has a support surface on which a workpiece 5 is fixed for polishing or grinding. Therefore, this structure enables the workpiece 5 to move along four axes, ie, x, y, z and c.

[0070] The polishing machine is also provided with a supporting member 6, on which a pivoting mechanism that can make the polishing head 7 rot...

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PUM

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Abstract

A machine for abrading or polishing a workpiece (5) comprises a holding surface (4) holding the workpiece (5), a head member (7) arranged along a rotation axis (h) to rotate about the rotation axis (h), a working member (8) having a surface for abrading or polishing the workpiece (5) arranged on the head member (7) on the rotational axis for rotation about the rotation axis (h) with the head member, a first driving arrangement for driving a head member (7) and the working member (8) mounted thereon to rotate about the rotation axis, a head mounting arrangement for mounting the head member (7), a second driving arrangement (700-800) for driving the head mounting arrangement to incline the rotation axis of the head member (7) relative to a precession axis intersecting the rotation axis, and for moving the head member (7) to inclined positions with the rotation axis precessed about the precession axis, and a third driving arrangement for relatively moving the head mounting arrangement across the holding surface.

Description

technical field [0001] The present invention generally relates to a polishing apparatus and method for grinding or polishing a workpiece. [0002] The invention also relates to a tool for grinding or polishing a workpiece and an abrasive cup mounted on the tool. Background technique [0003] The technique of grinding or polishing the surface of a workpiece is used in many different industrial fields including the production of semiconductor devices and optical components. This requires providing a surface with a specific surface profile and a specific surface finish, ie finish. In the field of optical polishing, there are two different techniques, one is to use tools with dimensions similar to the size of the workpiece for polishing. The limitation is that tools are designed for specific workpieces and cannot be used universally. In order to reduce this limitation, GB2163076 discloses an active polishing method, in which the pressure distribution acting on the workpiece i...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B7/22G02B3/00B24B7/24B24B13/00B24B13/01B24B13/015B24B13/02B24B17/10B24B29/00B24B37/04B24B41/00B24B41/04B24B47/12B24B51/00B24D3/06B24D3/28B24D3/34B24D9/04B24D11/00B24D13/14B24D13/20B24D18/00
CPCB24D3/28B24D13/20B24B17/10B24D13/147B24D11/001B24B1/00B24B13/00B24B13/02B24B41/04B24D9/04B24B13/015B24D13/14B24B7/24B24B47/12Y10S451/90B24B13/01B24D3/06B24D18/0009B24D3/342B24B7/241B24B51/00B24B29/00B24B7/228B24B41/002
Inventor R·宾厄姆D·C·赖利
Owner UNIV COLLEGE OF LONDON
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