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Substrate containing case

A technology for storing boxes and substrates, which is applied in the direction of sealing, packaging items, special packaging items, etc., which can solve the problems of easy generation of dust and difficulty in maintaining high quality of substrates, so as to prevent damage and pollution, enhance rigidity, The effect of preventing damage

Active Publication Date: 2008-08-20
DAI NIPPON PRINTING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] As mentioned above, in the conventional substrate storage box, the positioning and support of the substrate are realized separately, so dust is easily generated, and it is difficult to maintain the high quality of the substrate

Method used

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Examples

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example 1

[0065] Next, detailed examples of the above-mentioned preferred embodiments will be described.

[0066] In order to manufacture a substrate storage box specifically for a six-inch (external dimensions: 6 x 6 x 0.25 (thickness) inches) photomask, it is necessary to make a storage box for including the hinge 4 and the locking members 9 and 10 1 (external dimensions: 220 * 230 * 22 (thickness) millimeters) the casting mold of the upper cover 2 and the lower cover 3. The upper cover 2 and the lower cover 3 each having a resin thickness of 3 mm were formed using Novalloy (trade name) resin (manufactured by Daicel Polymer Co., Ltd., Japan). A convex engaging portion is provided on the upper cover 2 where it engages with the lower cover 3. This convex engaging portion serves as a spacer 8 made of elastic polyester resin, and at the corresponding portion of the lower cover 3 A concave engaging portion is provided. The hinge 4 is provided in such a manner that the upper cover 2 and t...

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PUM

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Abstract

A substrate containing case having an upper cover and a lower cover coupled to each other through hinges such that they can be opened / closed freely. Upper and lower supporting parts of a substrate are provided at four corners of the upper and lower covers, projecting from the inner surfaces of the covers. The lower supporting part of the lower cover serves to position and support simultaneously two edges at each corner of the substrate on the lower surface side. When the upper cover is closed, two edges at each corner of the substrate on the upper surface side are secured by the upper supporting part of the upper cover, and thus the substrate is contained.

Description

technical field [0001] The present invention relates to a substrate storage case for storing and carrying a substrate such as a photomask or a photomask blank for manufacturing a semiconductor element or a liquid crystal display, and more particularly, the present invention relates to a substrate storage case for Compared with a substrate storage box that sequentially stores and carries substrates, the box can store and carry even a photomask having one film. Background technique [0002] In a conventional substrate storage box for sequentially storing and carrying substrates, for example, a main body and a cover body connected by a hinge are included, and a The outer surfaces of the connecting part of the main body and the lid of the fixing part of the stored article shall be flush with each other, and the hinge and its engaging part shall be arranged at a lower position than the connecting part (for example, refer to Japanese Examined Practical Model Publication No. 6-306...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65D85/38B65D85/86B65D25/10B65D43/16H01L21/673
CPCH01L21/67383B65D43/163H01L21/67386H01L21/67353H01L21/67359B65D25/10B65D43/16B65D85/38H01L21/68
Inventor 中前聪
Owner DAI NIPPON PRINTING CO LTD
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