Method for converting standard process layout to system-level mode in micro-electromechanical system
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NORTHWESTERN POLYTECHNICAL UNIV
- Publication Date
- 2009-04-01
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a conversion method from a standard process layout in a micro-electro-mechanical system to a system-level model, and belongs to the field of micro-electro-mechanical system design. Background technique
[0002] At present, the method from process-level layout to system-level simulation in MEMS is to first draw the device layout, check the corresponding design rules, and manually build the corresponding model at the system level according to the designed layout for performance simulation. An ideal design method is to directly and automatically generate a system-level model based on a standard layout file, which can automatically convert from a standard process layout to a system-level model.
[0003] In the literature An Extraction-Based Verification Methodology for MEMS (JOURNAL OFMICROELECTROMECHANICAL SYSTEMS, VOL.11, NO.1, FEBRUARY 2002), Bikram Baidya et al. of CarnegieMellon University proposed a direct layout extraction m...