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Sensor substrate and check method and device using same

A technology for sensor substrates and inspection methods, applied in the direction of measuring devices, instruments, static indicators, etc.

Inactive Publication Date: 2009-09-09
NIHON MICRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] In this prior art, in addition to the inspection process for the presence or absence of disconnection, not only the process of determining the disconnection position of the wiring in the longitudinal direction must be performed, but also the determination of the lengthwise direction of the wiring must be performed for each disconnected wiring. process on the break position

Method used

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  • Sensor substrate and check method and device using same
  • Sensor substrate and check method and device using same
  • Sensor substrate and check method and device using same

Examples

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Embodiment Construction

[0059] Embodiments of the present invention will be described below with reference to the drawings.

[0060] Examples of inspected substrates

[0061] refer to figure 1 and figure 2 , the inspection device 10 is used for inspection of the substrate 12 to be inspected. The substrate to be inspected 12 is an unfinished substrate to be inspected such as a glass substrate for a liquid crystal display panel, and has a plurality of (six in the illustrated example) functioning as glass substrates of each completed liquid crystal display panel. ) routing area.

[0062] The inspection target substrate 12 has a plurality of parallel first circuits 16 and a plurality of parallel second circuits 18 on one surface of each wiring region of the flexible rectangular glass plate 14 . The first and second circuits 16 and 18 are electrically insulated by a transparent insulating layer (not shown) disposed therebetween.

[0063] The first circuit 16 extends toward the second direction at...

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Abstract

A sensor substrate, and an inspecting method and a device using the sensor substrate are provided to determine that a cable is disconnected if an abnormal signal is output from a sensor circuit, by relatively moving the sensor substrate and a substrate to be inspected, and then supplying an inspection signal from a feed electrode to the cable. A sensor substrate(20) for inspecting a substrate having plural cables arranged at regular intervals in a first direction and extended in a second direction is composed of at least one feed electrode(24) supplying an inspection signal without contacting to the cable; plural receiving electrodes(28) aligned at regular intervals at least in a first direction and extended at regular intervals from the feed electrode toward a second direction to receive the inspection signal fed to the cable without contact; and plural sensor circuits outputting an electric signal indicating whether the receiving electrodes receive the signal or not.

Description

technical field [0001] The present invention relates to a sensor substrate used for inspection of a substrate to be inspected having many wiring lines, such as a glass substrate for a liquid crystal display panel, and an inspection method and apparatus using the sensor substrate. Background technique [0002] For a substrate to be inspected that includes many wirings (ie, circuits) extending vertically and horizontally, such as a glass substrate used in a liquid crystal display panel, the presence or absence of breaks and short circuits in these wirings is inspected. There is a technology described in Patent Document 1 as one of sensor substrates used in such inspections and inspection methods and devices using the sensor substrates. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2004-191381 [0004] This conventional sensor substrate has at least a pair of power supply electrodes and power reception electrodes spaced apart in the longitudinal direction of wiring...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/02G01R31/28G01R31/00G09G3/00
CPCG01R31/50G02F1/1309
Inventor 池田真人
Owner NIHON MICRONICS
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