Method for pretesting and forecasting ion beam polishing process result

A technology of ion beams and processes, applied in special data processing applications, instruments, electrical digital data processing, etc., can solve the problems of complex calculations in the forecasting process and lack of forecasting

Inactive Publication Date: 2009-10-14
NAT UNIV OF DEFENSE TECH
View PDF2 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The advantage of this method is that the prediction results are intuitive and reliable, but the disadvantage is that the calculation of the prediction process is complicated, and the residence time needs to be calculated first, and the prediction method lacks the prediction and prediction of the changes of each frequency component in the processing process

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for pretesting and forecasting ion beam polishing process result
  • Method for pretesting and forecasting ion beam polishing process result
  • Method for pretesting and forecasting ion beam polishing process result

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0037] The ion beam polishing process of this embodiment is carried out on an ordinary ion beam polishing equipment, and its process parameters are: the working gas is argon, and the working vacuum is 0.8×10 -2 Pa, ion energy 1100eV, beam current 25mA. The test workpiece to be polished is the ordinary glass-ceramics with a diameter of 100mm that has undergone traditional grinding and polishing, and the method of the present invention is used to predict the result of processing the ordinary glass-ceramics with a diameter of 100mm through the above-mentioned ion beam polishing process. The specific steps of the method are as follows:

[0038] 1. Determine the removal function of the polishing process: apply the ion beam polishing process under the above process parameters to carry out the removal function test to obtain the removal function: the removal function test time is 1 minute, and the obtained removal function test result p(x, y) is as follows figure 1 shown;

[0039] ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
diameteraaaaaaaaaa
Login to view more

Abstract

According to the consistency of the mathematical model between the shape modification process and the two-dimensional filtering process, the invention discloses a method for predicting and forecasting the results of ion beam polishing. The method firstly determines the removal function of the polishing process, and then determines the The equivalent low-pass filter impulse response function, and then use the surface shape detection device to perform error detection on the optical mirror, and calculate the surface shape residual error according to the detected surface shape error and the filter impulse response function, according to the calculated The surface shape residual can realize the prediction and prediction of the ion beam polishing processing results. On this basis, the variation of each spatial frequency component before and after processing (that is, the PSD spectrum) can also be predicted according to the filter impulse response function. The prediction method of the invention is not only simpler and more operable, but also makes the prediction result more intuitive, reliable and comprehensive.

Description

technical field [0001] The invention belongs to the field of optical processing, in particular to a method for predicting and forecasting processing results in a polishing process. Background technique [0002] In the ion beam modification processing technology, the current prediction method of processing results is based on the simulation method of virtual processing. This method first calculates the dwell time, and then performs virtual processing to calculate the residual error distribution of virtual processing. The advantage of this method is that the prediction result is intuitive and reliable, but the disadvantage is that the calculation of the prediction process is complex, and the dwell time needs to be calculated first, and the prediction method lacks the prediction and prediction of the change of each frequency component in the processing process. Contents of the invention [0003] The technical problem to be solved by the present invention is to overcome the de...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): G06F17/00C03C23/00
Inventor 解旭辉李圣怡戴一帆周林焦长君陈善勇王贵林
Owner NAT UNIV OF DEFENSE TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap