Esd protection circuit and semiconductor structure
A technology for electrostatic discharge protection and electrostatic discharge, which can be used in semiconductor devices, circuits, semiconductor/solid-state device components, etc., and can solve the problem of high resistance
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[0030] In order to make the above objects, features and advantages of the present invention more comprehensible, a preferred embodiment is specifically cited below, and is described in detail in conjunction with the accompanying drawings as follows:
[0031] figure 1 A cross-sectional view of a diode string in a conventional ESD protection circuit 100 is shown. The diode string is connected between a VDD pad 102 and another complementary VSS pad 104 . Diodes 106 , 108 , 110 , 112 , and 114 are all the same, and each diode has a P-type heavily doped region 116 and an N-type heavily doped region 118 , all placed in an N-type well 120 . In all diodes, the vertical direction produces a parasitic PNP transistor 122, the emitter is connected to the P-type heavily doped region 116, the base is connected to the N-type heavily doped region 118, and the collector is connected to VSS through the semiconductor substrate . The diodes 106 , 108 , 110 , 112 , and 114 are connected in seri...
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