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Dust removing appts.

A technology for a dust removal device and a dust removal chamber, which is applied in cleaning methods and utensils, chemical instruments and methods, and cleaning methods using gas flow, etc., can solve problems such as insufficient removal of foreign objects.

Inactive Publication Date: 2007-09-19
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, there is a problem in that, simply blowing compressed air to the parts may not sufficiently remove foreign matter adhering to three-dimensional parts or parts with uneven or complicated shapes.

Method used

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  • Dust removing appts.
  • Dust removing appts.
  • Dust removing appts.

Examples

Experimental program
Comparison scheme
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Embodiment approach

[0031] FIG. 1 is a schematic perspective view showing a dust removal device 10 according to an embodiment of the present invention.

[0032] The dust removal device 10 is an example of a dust removal device.

[0033] As shown in FIG. 1 , the dust removal device 10 has a dust removal chamber 12 . The dust removal room 12 is an example of a dust removal room.

[0034] The dust removal device 10 has a control device 11 for controlling each part. Although the control device 11 is connected to each part, illustration of the connection state is omitted. The control device 11 is an example of a control device.

[0035] The dust removal chamber 12 has a holding stand 30 for holding the parts 50 . The holding table 30 is an example of a holding table. Part 50 is an example of a processing target. Part 50 is, for example, a part of a projector which is a precision device.

[0036] The dust removal device 10 has a power supply device 20 . A power supply 20a is accommodated in the...

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PUM

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Abstract

Provided is a dust collector which can adequately remove the eyewinker attached on the parts with the solid shape and concave convex and complex shape. The dust collector includes: a dust chamber 12 for keeping the maintaining station 30 of the processed object 50; an air jet device 22 for blowing the air on the processed object 50; and a negative pressure generating device 18 for attracting the dust from the dust chamber 12, wherein the dust chamber 12 has a maintaining station shifter for keeping the maintaining station 30 moving on a plane, and the maintaining station 30 can be inclined.

Description

technical field [0001] The present invention relates to a dust removal device used in the manufacturing process of precision equipment. Background technique [0002] Conventionally, in the process of manufacturing components of precision equipment, a dust removal device for removing foreign matter such as dust adhering to each component by blowing compressed air to the components is used (for example, Patent Document 1). [0003] Patent Document 1: JP-A-2005-199169 [0004] However, there is a problem that foreign matter adhering to three-dimensional parts or parts having uneven or complicated shapes may not be sufficiently removed simply by blowing compressed air to the parts. Contents of the invention [0005] Therefore, an object of the present invention is to provide a dust removal device capable of sufficiently removing foreign matter adhering to a three-dimensional shape or a component having a complicated shape with unevenness. [0006] Aforesaid object, according...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B5/00
Inventor 伊藤文人
Owner SEIKO EPSON CORP