Measuring system and its measuring method for large field object micro surface three dimension topography

A technology of three-dimensional shape and measurement system, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of measuring the surface shape of non-transparent objects, etc., so that the aberration will not deteriorate, the accuracy will be increased, and the measurement accuracy will be high. Effect

Inactive Publication Date: 2007-10-10
TIANJIN UNIV
View PDF3 Cites 47 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Chinese patent 02103611.X discloses a method of measuring the surface topography of transparent objects using a transmission differential interference phase-contrast microscope, but this method cannot measure the surface topography of non-transparent objects

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Measuring system and its measuring method for large field object micro surface three dimension topography

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0047] The measurement system and method for measuring the three-dimensional topography of the microscopic surface of objects with a large field of view according to the present invention will be described in detail below in conjunction with the embodiments.

[0048] The measurement system for the three-dimensional topography of the microscopic surface of a large field of view object of the present invention includes a light source 1, and is also provided with a concentrating system 2 for receiving the light source 1. The concentrating system 2 includes: first concentrating mirrors 21 arranged in sequence , the second condenser lens 22, an optical filter 25, an aperture stop 26, the third condenser lens 23, a field diaphragm 27, and a fourth condenser lens 24; the output light side of the condenser system 2 is provided with a first light splitter Mirror 3; a microscopic objective lens 4, a reference surface 5, a second beam splitter 6, a measured surface 7, and a precision disp...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

A method for measuring micro-surface 3-D morphology of large field object includes starting up device and switching on PZT switch to collect the first frame of interference image, controlling PZT to drive micro-objective lens and reference surface to move along optical axis and collecting multi-frame of phase shift interference images (PSII), using precise displacement platform to move measured surface and collecting multi-frame of PSII at relevant positions, deriving out test data and carrying out relevant treatments for obtaining 3-D morphology of said object. The system used for realizing said method is also disclosed.

Description

technical field [0001] The invention relates to a microscopic object surface topography measurement technology. In particular, it relates to a measurement system for measuring the three-dimensional topography of the microscopic surface of a large-field object by using phase-shift micro-interferometry, which has high measurement accuracy and does not damage the surface of the measured surface. method. Background technique [0002] The detection of the three-dimensional shape of the object has always been an important detection content. The methods of measuring the surface topography of objects are mainly divided into contact measurement method and non-contact measurement method. [0003] The contact measurement method uses a contact probe to scan the surface of the sample line by line. Although this method has high precision, it is easy to damage the surface of the measured surface. [0004] For precise object surface topography, non-contact measurement methods are more fe...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01B11/24
Inventor 张红霞张以谟井文才贾大功李晓静
Owner TIANJIN UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap