A surface-array point-scanning spectroscopic white light interferometer

A white light interferometer and point scanning technology, applied in the field of optical instruments, can solve problems such as inability to receive reflected light, failure to achieve detection results, misjudgment of detection results, etc., to achieve good energy uniformity, large detection depth of field range, and stable energy Effect

Active Publication Date: 2022-04-05
SUZHOU CASIA ALL PHASE INTELLIGENCE TECH CO LTD +1
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the reflected light of the sample is specular reflection, the sample objective lens cannot receive enough reflected light in the off-axis field of view, and the detection effect cannot be achieved; the focusing lens will focus the light after the grating splits light to the detector, which will easily cause energy unevenness, which is harmful to the detection Result misjudgment

Method used

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  • A surface-array point-scanning spectroscopic white light interferometer
  • A surface-array point-scanning spectroscopic white light interferometer
  • A surface-array point-scanning spectroscopic white light interferometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0065] Such as Figure 1-4 As shown, the SLD light source uses a near-infrared broadband light source with a power of 25mw and a wavelength of 810-870nm; the isolator uses an 850nm broadband isolator; the coupler is an X-type single-mode fiber coupler, the numerical aperture of the fiber is 0.13, the core diameter is 5um, and the splitting ratio is 50 : 50; collimator adopts diffractive polar achromatic lens, focal length is 18.45mm; beam splitting prism splitting ratio is 50:50; third lens is achromatic lens with focal length 50mm; mirror is coated with near-infrared high reflection film, reflectivity >99.5% ;The XY scanning galvanometer has an effective incident spot diameter of 7mm and a maximum scanning angle of 5 degrees; the grating is a 1800lp transmission grating with a blaze angle of 49.2 degrees@840nm; the first lens and the second lens use the same achromatic telecentric lens, and the field of view angle is 10 degrees , the focal length is 83.9mm; the pixel size of ...

Embodiment 2

[0068] Such as Figure 10 As shown, compared with Embodiment 1, the remaining modules remain unchanged, and only the fourth lens is replaced to achieve different scanning ranges and different depths of field. The fourth lens has a field of view of 28 degrees, a focal length of 70mm, and an entrance pupil diameter of 5mm. The scanning field of view is 24.4*24.4mm, and the depth of field is 0.67mm.

[0069] Such as Figure 11 as shown, Figure 11 It is the MTF curve of the fourth lens of this embodiment, which basically reaches the diffraction limit level and has high resolution.

Embodiment 3

[0071] Such as Figure 12 As shown, compared with Embodiment 1, the remaining modules remain unchanged, and the fourth lens is replaced to achieve different scanning ranges and different depths of field. The fourth lens has a field of view of 28 degrees, a focal length of 100mm, and an entrance pupil diameter of 5mm. The scanning field of view is 34.9*34.9mm, and the depth of field is 1.36mm.

[0072] Such as Figure 13 as shown, Figure 13 It is the MTF curve of the fourth lens in Example 3, which basically reaches the diffraction limit level and has high resolution.

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Abstract

The invention relates to an area array point-scanning spectroscopic white light interferometer. The SLD light source emits a broadband spectrum. The light passes through an isolator and a fiber coupler in sequence. , a beam of light is reflected by the third lens and focused to the mirror as a reference arm, and a beam of light is incident on the XY scanning galvanometer, and the light with a certain field of view reflected by the scanning galvanometer enters the fourth lens, and the fourth lens Focus on the sample to realize area scan. The XY scanning galvanometer is placed on the object focal plane of the fourth lens, so that the light focused by the fourth lens is a telecentric optical path on the image side; it can realize area scanning with high speed, simplicity and high precision.

Description

technical field [0001] The invention relates to an optical instrument, in particular to an optical instrument for non-contact measurement, and more particularly to an area array point scanning spectroscopic white light interferometer. Background technique [0002] The white light scanning interference technology uses white light as the light source, its coherence length is short, and the interference fringes only appear in a small range. When the optical path difference is zero, the interference signal has a maximum value, and this point represents the height information of the corresponding point, which can Restore the overall shape of the tested sample. Spectroscopic white light interferometer is an important direction of white light interference. This technology mainly uses spectrometers for collection, splits white light into different wavelengths, and determines surface morphology by analyzing spectral signals. Compared with traditional white light interferometry techno...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02015
CPCG01B9/02
Inventor 赵效楠王毅彭思龙汪雪林顾庆毅王一洁
Owner SUZHOU CASIA ALL PHASE INTELLIGENCE TECH CO LTD
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